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Scanning error detection and compensation algorithm for white-light interferometry
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DOI：10.1016/j.optlaseng.2021.106768.png)
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As the primary error source in white-light interferometry (WLI), the error of scanning steps directly affects coherence peak sensing and greatly lowers the measurement accuracy. Based on the least-squares iterative algorithm, we present an algorithm to detect and compensate for scanning error in WLI. The actual scanning step is calculated from the continuous moving fringes with an iterative algorithm, and the surface is reconstructed with the calculated scanning steps to make compensation. Both simulations and experiments indicate that the high-accuracy measurements can be implemented under disturbance over a wide frequency band. The proposed algorithm could relax the environment requirement of white-light interferometer application.
Keyword:
White-light interferometry
Surface topography measurement
Vibration resistance
Iterative algorithm
期刊
IF:
3.7
论文数:
7.3K
被引数:
1.7W
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