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Single-shot freeform surface profiler
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DOI：10.1364/OE.380305.png)
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摘要
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We propose a novel and simple method of single-shot freeform surface profiler based on spatially phase-shifted lateral shearing interferometry. By the adoption of birefringent materials, the laterally shearing waves are simply generated without any bulky and complicated optical components. Moreover, the phase maps that lead to the 3D profile of the freeform surface can be instantly obtained by the spatial phase-shifting technique using a pixelated polarizing camera. The proposed method was theoretically described and verified by measuring several samples in comparison to the measurement results with a well-established stylus probe. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Keyword:
WAVE
COMPACT
SYSTEM
期刊
IF:
3.3
论文数:
6.1W
被引数:
14.3W
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