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Angular resolution enhancement of electron backscatter diffraction patterns
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DOI：10.1016/j.ultramic.2025.114304.png)
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Abstract
En 中文
We present a simple 'shift and add' based improvement in the angular resolution of single electron backscatter diffraction (EBSD) patterns. Sub-pixel image registration is used to measure the (sub-pixel) difference in projection parameters for patterns collected within a map, and then the pattern is shifted and added together. The resultant EBSD-pattern is shown to contain more angular information than a long-exposure single pattern, via 2D Fast Fourier Transform (FFT)-based analysis. In particular, this method has the potential to enhance the scope of small compact direct electron detectors (DEDs).
Keywords:
Diffraction
Image processing
Electron microscopy