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Fast tapping mode atomic force microscopy based on fuzzy PI controller
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DOI：10.1016/j.ultramic.2025.114281.png)
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Abstract
En 中文
Atomic Force Microscopy (AFM), as a scanning probe microscopy technique, has been extensively utilized for nanoscale structural characterization, mechanical property quantification, and in-situ electromagnetic field measurements with high spatial resolution. However, the primary limitations hindering the widespread application of AFM include its relatively low scanning velocity, intricate parameter optimization requirements, and the necessity for highly skilled operators to achieve optimal imaging resolution. In this paper, a novel fuzzy amplitude-modulated PI (Proportional-Integral) control methodology is proposed for AFM adaptive control systems, incorporating dynamically adjusted proportional and integral gain parameters to effectively mitigate measurement inaccuracies. Experimental characterization demonstrates that the proposed fuzzy control scheme effectively confines amplitude error to approximately 60 pm under operational conditions of 10 Hz scan rate and 40 mu m scan size. This methodology establishes a systematic framework for optimizing parameter configuration in AFM, while simultaneously addressing the critical challenge of achieving high-speed performance in scanning probe microscopy applications.
Keywords:
Atomic force microscopy
Pi control
Fuzzy control
Fast tapping mode