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Zero displacement microelectromechanical force sensor using feedback control
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DOI：10.1063/1.4871380.png)
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Abstract
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Conventional microscale force sensors use moving parts to infer applied forces. Whenever physical deformations are involved, the sensor characteristics become a function of mechanical parameters, and there is an inevitable trade-off between the sensitivity and measurement range. We developed a microfabricated force sensor that uses feedback control to nullify any displacements within the device, directly transducing forces as high as 1.5 mN with a 7.8 nN resolution. The range and sensitivity of the device no longer depend on mechanical parameters, which allow the same device to be used to test samples with a wide range of stiffnesses without loss of accuracy. (C) 2014 AIP Publishing LLC.
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