A Study on Thin-Film Dispersion Interference Spectral Measurement by Integrating Deep Learning and Physical Model Fitting
Wu, Tong; Li, Haopeng; Liu, Chenxu; Zhang, Chuan; Wu, Jiahao; Yu, Jingwei; Liu, Jianjun; Zheng, Zepei; Duan, Bosong; Sun, Anyu; Ju, Bingfeng
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Save Extending Reflectometry Range: A Zero-Crossing Algorithm for Thick Film Metrology
Zhou, Zimu; Lopez-Guerra, Enrique A.; Zana, Iulica; Nguyen, Vu; Tran, Nguyen Quoc Huy; Huang, Violet; Zhou, Bojun; Qian, Gary; Kwan, Michael; Wilkens, Peter; Chien, Chester
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