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Journal of Microelectromechanical Systems

IF3.1
Papers109
Citations
Journal Papers 109
Publication Date
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A MEMS Skewed Oscillating Mirror With Piezoresistive Transduction for Photoacoustic CO<sub>2</sub> Gas Detection
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-22
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PREAI
deleteGaopeng Xue; Yun Liu; Penghong Shi; Mengyuan Wang; Qirun Wang; Yonggang Jiang; Bing Li; Minjie Zhu
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A High-Performance Aluminum Nitride Piezoelectric MEMS Hydrophone With Island Piezo-Patterned Structure
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-22
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PREAI
deleteWenhao Li; Zhao Li; Yunchao Qi; Weiwei Cui; Hao Zhang
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Toward Artificial Nociceptors Based on Memristor-Like MEMS Resonator
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-12
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PREAI
deleteErion Uka; Chun Zhao
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High Fill-Factor Large-Angle Three-Degree-of-Freedom Vector Scanning Micromirror Array
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-12
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PREAI
deleteManpeng Chang; Yu Jian; Tao Chen; Jiyang Zhang; Chen Liu; Xin Wang; Weimin Wang
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Actuating Liquid Metal in Microchannels With Minimized Electrolyte for Reconfigurable RF Applications
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-02
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deleteMaheeja Maddegalla; Veikka Korhonen; Tung Duy Phan; Jaakko Palosaari; Tuomo Siponkoski; Sami Myllymäki; Michael D. Dickey; Jari Juuti; Ping Jack Soh
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Simultaneous Measurement of Magnetic Field and Temperature Based on Optical Vernier Effect and Fiber Fabry-Pérot Cavity
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-02
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PREAI
deleteHong Zhang; Shengli Pu; Pan Zhou; Dan Dong; Xiaolin Lv
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Hybrid Electrostatic-Axial Force Tuning for Mode Matching in Piezo-MEMS Pitch or Roll Gyroscopes
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-13
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PREAI
deleteZhenxiang Qi; Jie Gu; Zhaoyang Zhai; Kunfeng Wang; Wuhao Yang; Xiaorui Bie; Yao Wang; Xudong Zou
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High-Coupling Thickness-Shear Mode Solidly Mounted Resonator Using Y-cut LiNbO<sub>3</sub> Thin Film via Transfer Bonding
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-07
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PREAI
deleteRonghui Wang; Min Zeng; Wenjuan Liu; Zhiwei Wen; Yao Cai; Shishang Guo; Guoqiang Wu; Chengliang Sun
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Analysis of Vibration Characteristics of Clamped–Clamped Shallow Arch Beam Subjected to Heat for Micromechanical Resonant Optical Sensing
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-01
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PREAI
deleteNaoki Matsuzuka; Daisuke Yasugi; Naoki Kondo; Akio Uesugi; Koji Sugano; Yoshitada Isono
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Irreversible Membrane Deformation and Other Defects in Silicon-on-Nothing Structures: Experimental Insights and Cavity Pressure Characterization
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-01
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deleteZhengnan Tang; Andrea Vergara; Shuji Tanaka
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A MEMS Piezoresistive Micro-Pressure Sensor With Ultra-Low Nonlinearity Over a Wide Operating Temperature Range
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-01
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PREAI
deletePengfei Zhang; Chengyu Wang; Xiong Cheng; Zhikang Lan; Xiangkun Jiao; Zechun Dou; Jian Guo; Can Chen; Xiaobo Li; Weiping Li; Daying Sun; Xiaodong Huang
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Sub-30 nm Silicon Nanopatterning: Toward Reduced Reflectance and Enhanced Sensitivity in CMOS Image Sensors
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-22
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PREAI
deleteByoungGyu Kim; Yongkeun Lee
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Exploring the Tunability of a Memristor-Like Device Based on MEMS Resonators
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-21
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PREAI
deleteErion Uka; Chun Zhao
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Modeling and Validation of Rate-Integrating Gyroscopes With <inline-formula> <tex-math notation="LaTeX">$0.01~^{\circ}/\sqrt{\text{h}}$ </tex-math></inline-formula> ARW and <inline-formula> <tex-math notation="LaTeX">$100~\mu^{\circ}/\sqrt{\text{Hz}}$ </tex-math></inline-formula> AWN
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-20
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PREAI
deleteRiccardo Nastri; Stefano Zoia; Davide Pavesi; Pietro Peliti; Valentina Zega; Gabriele Gattere; Luca Falorni; Giacomo Langfelder; Paolo Frigerio
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Analytical Modeling and Experimental Verification of Novel Parallel In-Plane Electrothermal Actuators
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-20
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PREAI
deleteYen Nee Ho; Aron Michael; Chee Yee Kwok
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Integrated MEMS Passive Strain Sensor With a Direct-Contact Resistive Detection Mechanism
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-20
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PREAI
deleteAlberto Prud'homme; Paul D. Okulov; Frederic Nabki
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Lateral-Field-Excited PMUTs Based on Bilayer X-Cut Lithium Niobate
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-16
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PREAI
deleteXiaoxi Zhao; Michiel A. P. Pertijs; Tomás Manzaneque
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Mechanical Modeling and Optimized Design of In-Plane Fabry–Perot Cavities for Polymer Swelling Sensing
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-16
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PREAI
deleteRégis Guertin; Marek Pinard; Marc-Antoine Bianki; Yves-Alain Peter
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Nanoelectromechanical Voltage-to-Time Converter for Low-Power IoT Devices
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-13
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PREAI
deleteGuangwei Liao; Yingying Li; Mukesh K. Kulsreshath; Jiayang Li; Simon J. Bleiker; Roshan Weerasekera; Frank Niklaus; Dinesh Pamunuwa
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MEMS Microbreaker With Electrostatically Actuated Closure and Tunable Electrothermal Reset
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-04-10
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PREAI
deleteAbdurrashid Hassan Shuaibu; Almur A. S. Rabih; Yves Blaquière; Frederic Nabki
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