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Journal of Microelectromechanical Systems

IF3.1
Papers121
Citations
Journal Papers 121
Publication Date
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Locally Buried SiO2 for TCF Compensation of LiNbO3 Thickness-Excited Resonators
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-12
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PREAI
deleteFlorian Hartmann; Luis Guillermo Villanueva
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Gas Detection Based on Thermal Conductivity Using Auxetic Structures
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-08
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PREAI
deleteWagner Barth Lenz; Rodrigo Tumolin Rocha; Mohammad I. Younis; Carlos A. Grande
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The Film Evaporation MEMS Tunable Array: A Review and Development Status
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-08
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PREAI
deleteJesus A. Meza-Galvan; Anthony G. Cofer; Steven Pugia; Katherine Fowee-Gasaway; Stephen Heister; Alina Alexeenko; Khary Parker
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Design, Multiphysics Modeling, and Experimental Characterization of RF AlScN Magnetoelectric Antennas
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-09-16
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PREAI
deleteNicol Maietta; Samuel Quaresima; Yisi Liu; Onurcan Kaya; Junhao Dong; Mingzhong Wu; Xufeng Zhang; Cristian Cassella
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A Wafer-Level Test Approach for Adhesion and Wear Characterization in MEMS Accelerometers
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-09-09
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PREAI
deleteLukas Ackermann; Matthew Lewis; Gevorg Aleksanyan; Marvin Freier; Dominic Palm; Jens Anders
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Low-Frequency Pressure-Gradient MEMS Vector Hydrophone Using AlN/ScAlN Composite Films
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-20
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PREAI
deleteZhenyao Shi; Rong Dang; Junyang Li; Chenghao Hu; Guojun Zhang; Renxin Wang; Wendong Zhang; Licheng Jia
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A Thermal Convection Tilt Sensor With Synergistic Thermal Control and Adaptive Filtering for Long-Term Drift Suppression
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-20
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PREAI
deleteTingfeng Peng; Mengqi Zheng; Yixuan Zhang; Yuan Wang; Michael Kraft; Huahuang Luo
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Long-Term Frequency Stability of a Dual-Oven MEMS Oscillator Based on a High-Q Lateral Extensional Resonator
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-14
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PREAI
deleteMaliha Sultana; Hannaneh Mahdavi; Hamed Atashbar; Hakhamanesh Mansoorzare; Reza Abdolvand
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Experimental Characterization and Optimization of Palladium-Coated Laterally Vibrating Resonators for High-Sensitivity Hydrogen Sensing
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-12
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PREAI
deleteGaia Giubilei; Farah Ben Ayed; Pietro Simeoni; Zhenyun Qian; Matteo Rinaldi
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Toward Mem-Re-Sensors: Memristor-Like Pinched Hysteresis in an Open-Loop MEMS Resonator Using Third-Order Duffing Nonlinearity
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-07-23
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PREAI
deleteRyan Leatherbarrow; Erion Uka; Chun Zhao
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Thickness-Field Excited Bimorph Lithium Niobate Piezoelectric Transducer
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-07-23
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PREAI
deleteVakhtang Chulukhadze; Zihuan Liu; Lezli Matto; Ziqian Yao; Michael Liao; Tzu-Hsuan Hsu; Mark S. Goorsky; Neal Hall; Ruochen Lu
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A MEMS Skewed Oscillating Mirror With Piezoresistive Transduction for Photoacoustic CO2 Gas Detection
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-22
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PREAI
deleteGaopeng Xue; Yun Liu; Penghong Shi; Mengyuan Wang; Qirun Wang; Yonggang Jiang; Bing Li; Minjie Zhu
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A High-Performance Aluminum Nitride Piezoelectric MEMS Hydrophone With Island Piezo-Patterned Structure
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-22
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PREAI
deleteWenhao Li; Zhao Li; Yunchao Qi; Weiwei Cui; Hao Zhang
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Toward Artificial Nociceptors Based on Memristor-Like MEMS Resonator
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-12
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PREAI
deleteErion Uka; Chun Zhao
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High Fill-Factor Large-Angle Three-Degree-of-Freedom Vector Scanning Micromirror Array
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-12
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PREAI
deleteManpeng Chang; Yu Jian; Tao Chen; Jiyang Zhang; Chen Liu; Xin Wang; Weimin Wang
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Actuating Liquid Metal in Microchannels With Minimized Electrolyte for Reconfigurable RF Applications
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-02
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deleteOAAI
deleteMaheeja Maddegalla; Veikka Korhonen; Tung Duy Phan; Jaakko Palosaari; Tuomo Siponkoski; Sami Myllymäki; Michael D. Dickey; Jari Juuti; Ping Jack Soh
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Simultaneous Measurement of Magnetic Field and Temperature Based on Optical Vernier Effect and Fiber Fabry-Pérot Cavity
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-02
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PREAI
deleteHong Zhang; Shengli Pu; Pan Zhou; Dan Dong; Xiaolin Lv
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Hybrid Electrostatic-Axial Force Tuning for Mode Matching in Piezo-MEMS Pitch or Roll Gyroscopes
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-13
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PREAI
deleteZhenxiang Qi; Jie Gu; Zhaoyang Zhai; Kunfeng Wang; Wuhao Yang; Xiaorui Bie; Yao Wang; Xudong Zou
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High-Coupling Thickness-Shear Mode Solidly Mounted Resonator Using Y-cut LiNbO3 Thin Film via Transfer Bonding
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-07
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PREAI
deleteRonghui Wang; Min Zeng; Wenjuan Liu; Zhiwei Wen; Yao Cai; Shishang Guo; Guoqiang Wu; Chengliang Sun
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Analysis of Vibration Characteristics of Clamped–Clamped Shallow Arch Beam Subjected to Heat for Micromechanical Resonant Optical Sensing
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-05-01
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PREAI
deleteNaoki Matsuzuka; Daisuke Yasugi; Naoki Kondo; Akio Uesugi; Koji Sugano; Yoshitada Isono
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