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IEEE Transactions on Semiconductor Manufacturing
IF
2.3
Papers
64
Citations
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Journal Papers
64
Related Insights
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Journal Papers
64
Publication Date
Publication Date
IF
Citations
Automating Root Cause Analysis in Semiconductor Manufacturing Using Transformer Models With Explainable AI
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Alothman, Youssef; Bader-El-Den, Mohamed; Maurya, Lalit; Amer, Eslam
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Fast Global Sparse Principal Component Analysis for Sensor Reduction in Virtual Metrology
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Xie, Yifan; Wang, Tianhui; Jeong, Myong K.
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Finite Element Simulation of Localized Flip-Chip Thermo-Compression Bonding for GaN-Based Micro-LEDs
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Wang, Zhihua; Zhang, Kaixin; Yan, Qun; Lin, Chang; Zhou, Xiongtu; Sun, Jie
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A Transformer-Based Sequence Prediction Architecture for Etch Profile Evolution in Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Guo, Jianming; Ren, Kun; Gao, Dawei; Ni, Dong
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Sample-Efficient Modeling and Optimization of High-Dimensional Semiconductor Processes Using Output-Augmented Gaussian Process Regression and Dynamic Bayesian Optimization
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
1
PRE
AI
Maheshwari, Om; Mohapatra, Nihar R.
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Critical Roles of Copper Surface Planarity in Achieving Reliable Cu/SiO2 Hybrid Bonding
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Seo, Kangmin; Kim, Sunjae; Choi, Junyoung; Jang, Suin; Lee, Hoogwan; Kim, Sarah Eunkyung
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AI-Driven Optimization of Thin Film and CMP Processes in 3-D NAND Manufacturing
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
1
PRE
AI
Yu, Hsiang-Meng; Hsiao, Han-Yu; Hsieh, Meng-Hsun; Yang, Alex; Chang, Yu-Chih; Luoh, Tuung; Hsieh, Jung-Yu; Yang, Ling-Wuu; Yang, Tahone; Chen, Kuang-Chao
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A Novel Health Index Framework for Semiconductor Equipment Using Multi-View Data
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Ahn, Jeongsun; Cho, Sang-Hyun; Kim, Hong-Yeon; Kim, Hongyeon; Choi, Hyeonjeong; Ham, Dain; Kim, Yongjo; Kim, Hyun-Jung
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Capacity Planning With Cluster Tool Constraints: Aligning Investment and Input Decisions in Research and Development Semiconductor Fabs
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Lee, Jinyoun; Kim, Kihong; Lee, Seungho; Kum, Euiseok
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Cross Domain Anomaly Detection in Semiconductor Manufacturing via Projection Comparison and Reconstruction in Latent Space
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Lv, Xinwei; Chen, Haiyong; Wang, Zhaoyang
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Novel Structure of a Deep Neural Network-Based Material Removal Rate Prediction Model for Multizone Chemical Mechanical Planarization Process Control
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Liu, Bangxu; Zhao, Dewen; Lu, Xinchun; Liu, Yuhong
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Semi-Damascene FSAV: Via CD and Overlay Process Window Analysis
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Hermans, Yannick; Marti, Giulio; Delie, Gilles; Murdoch, Gayle; Mingardi, Andrea; Halder, Sandip; Wu, Chen; Park, Seongho; Tokei, Zsolt
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Advanced SHG Metrology for Epitaxial SiGe Characterization in Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Liu, Zhongming; Liang, Jintai; Zhou, Puxi; Xu, Guangwei; Long, Shibing
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Computational Modeling and Optimization of Large-Area Showerhead Configurations in PECVD Reactors
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Barakat, Emad; Kim, Yeonchan; Hong, Joo Pyo; Park, Seungkyung
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Suppressing Hexagonal Defects in Ex Situ Remote Plasma Dry Etch Processing
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Cheng, Kangjian; Huang, Jingyan; Lew, Wen Siang
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Online Temperature Monitoring System for Semiconductor Automated Test Equipment Using Local Gaussian Process
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Kim, Jongwon; Baik, Seung Min; Yu, Dahm; Kim, Jaehyun; Ko, Young Myoung
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Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Wen, Chi-Jen; Lin, Tee; Ali Zargar, Omid; Hsieh, Chi-Huan; Hu, Shih-Cheng; Shih, Yang-Cheng; Leggett, Graham
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Investigating the Influence of Different Diverter Pipes on the Humidity for FOUP by Using Computational Fluid Dynamics
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Chan, Yen-Hsin; Du, Jia-Sheng; Lin, Ming-Xian; Hsu, Chi-Hua
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Comprehensive Framework for Identifying and Visualizing Key Yield Factors in Semiconductor Manufacturing
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Doh, Gyeunggeun; Seo, Jeongwoo; Oh, Sanghoun; Song, Minseok
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A Smart Stopper-Less CMP Technology With Optical Monitors for Nano-Scale Control of the Amorphous Si Film Thickness on 3D-Structured FinFETs and GAAFETs
IEEE Transactions on Semiconductor Manufacturing
IF
2.3
2026-05-01
0
PRE
AI
Kasashima, Yuji; Matsukawa, Takashi; Uejima, Kazuya; Hayashi, Yoshihiro
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