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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

IF2.1
Papers238
Citations
Journal Papers 238
Publication Date
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Plasma-assisted atomic layer etching of single-crystal diamond
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteDraney, J. S.; Panagiotopoulos, A. Z.; Graves, D. B.
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Atomic layer deposition of SnO2 thin films using tin(IV) acetate as a novel precursor
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteDeb, Anjan; Mattinen, Miika; Heikkila, Mikko J.; Chundak, Mykhailo; Vihervaara, Anton; Mizohata, Kenichiro; Ritala, Mikko; Putkonen, Matti
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Effect of gas additives on reaction barriers in cryo etching of silicon oxide and nitride
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteFan, Yichen; Lill, Thorsten; Wang, Mingmei; Wu, Dongjun; Iyer, Gopal; Barsukov, Yuri; Yang, Weitao; Singh, Harmeet
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Optimization of ion energy distribution and ion angular distribution by tuning chamber radius in inductively coupled plasma etching
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteHan, Jian-Hai; Wen, De-qi; Xu, Han-cheng; Xu, Shao-Feng; Guo, Ying; Shi, Jian-Jun
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Role of substrate heating in controlling meltpool behavior and reaction layer formation by the multibeam laser directed energy deposition
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteIlman, Kholqillah Ardhian; Yamashita, Yorihiro; Kunimine, Takahiro
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Microstructure and performance of microarc oxidation coatings doped with yttrium on TA4 commercial pure titanium
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteNie, Xiaoying; Liu, Ping; Chen, Xiaohong
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Thermal modulation spectroscopy for bandgap determination in plasma-assisted molecular beam epitaxy-grown AlN
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteContreras, E. A.; Vargas-Hernandez, L.; Zambrano-Serrano, M. A.; Trejo-Hernandez, R.; Felix-Quintero, H.; Avila-Gaxiola, J. C.; Casallas-Moreno, Y. L.; Yee-Rendon, C. M.; Lopez-Lopez, M.
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Influence of postdeposition temperature treatment on surface morphology of vanadium oxide grown by ion-beam sputter deposition
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteWollenweber-Bienerth, Yan Ravil; Chatterjee, Sangam; Klar, Peter J.; Becker, Martin
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Temperature effects in oxidative molecular layer deposition (oMLD) of polypyrrole
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteMehregan, Mahya; Mehregan, Shima; Young, Matthias J.
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STM and ARPES characterization of quality of GeSn grown on Ge(001) for atomic ordering investigations
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteBaral, Dinesh; Joshi, Ram; Eldose, Nirosh M.; Stanchu, Hryhorii; de Oliveira, Fernando Maia; Zhang, Diandian; Du, Wei; Nakamura, Hiroyuki; Mazur, Yuriy I.; Yu, Shui-Qing; Salamo, Gregory J.
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Local slip resistances and critical resolved shear stresses for edge dislocation glide on high-order planes in two refractory multiprincipal element alloys
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteRaj, Anshu; Jian, Wu-Rong; Xu, Shuozhi
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Using combinatorial sputtering to uncover new magnetic high entropy alloys
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteMorley, Nicola A.; Rowan-Robinson, Richard M.; Wilkinson, Tom; Bai, Jing; Gu, Jianglong
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Atomic-scale confinement at the graphene/SiC interface: A platform for novel two-dimensional nanomaterials
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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PREAI
deleteLu, Li-Syuan; Vera, Alexander; Turker, Furkan; Ananthanarayanan, Krishnan Mekkanamkulam; Dong, Chengye; Wetherington, Maxwell; Robinson, Joshua A.
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Tuning of atomic layer deposition pulse time through physics-informed Bayesian active learning
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteNavabi, Pouyan; Takoudis, Christos G.
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Morphology investigation of metalorganic vapor phase epitaxy homoepitaxial (001) β-Ga2O3 growth on on-axis and 6° off-axis substrates
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
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deleteChen, Han-Hsu; Chou, Ta-Shun; Bin Anooz, Saud; Galazka, Zbigniew; Kwasniewski, Albert; Bergmann, Sabine; Popp, Andreas
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In vacuo investigation of atomic layer deposition of HfO2 thin films on TiN: A low energy ion scattering and x-ray photoelectron spectroscopy study of interface evolution
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
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deleteChundak, Mykhailo; Nieminen, Heta-Elisa; Vehkamaki, Marko; Keranen, Laura; Putkonen, Matti; Ritala, Mikko
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Tuning the optoelectronic properties of NiOx thin films by atomic layer deposition with a precise incorporation of aluminum atoms
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteCoutancier, Damien; Pinal, Yann; Priaud, Tristan; Johnson, Erik V.; Bechu, Solene; Bouttemy, Muriel; Schneider, Nathanaelle
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Controlled nucleation of metal-sulfide layers via surface functionalization with sulfur species: Enhanced initial growth of GaSx thin films
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteBaji, Zsofia; Kovacs, Zoltan; Szabo, Zoltan; Hakkel, Orsolya; Sulyok, Attila; Fogarassy, Zsolt; Berces, Zsofia; Volk, Janos
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Preparation of high-quality self-supporting aluminum films using a poly(α-methylstyrene) sacrificial layer
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteZhang, Junhui; Cheng, Jiewei; Zhao, Shirong; Peng, Ruiqin; Zhang, Zihong; Huang, Yawen; Zhang, Wen; Zhong, Zhaoxin; Cao, Linhong; Fu, Yajun
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Publishing FAIR and machine-actionable reviews in materials science: The case for symbolic knowledge in neuro-symbolic artificial intelligence
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF2.1
delete2026-05-01
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deleteD'Souza, Jennifer; Auer, Soren; Poupaki, Eleni; Watkins, Alex; Devi, Anjana; Puurunen, Riikka L.; Karasulu, Bora; Mackus, Adriaan; Kessels, Erwin
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