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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

IF1.2
Papers103
Citations
Journal Papers 101
Publication Date
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Enhancement of etch rate and selectivity for tungsten carbide hardmask
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteSong, Wan Soo; Kim, Beom Seok; Kim, Aram; Hong, Sang Jeen
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Field emission properties of large-area flexible emitter based on polyvinyl alcohol-carbon nanotube nanocomposite
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteFilippov, Sergei V.; Vasin, Sergei V.; Trofimuk, Andrei D.; Kolosko, Anatoly G.; Popov, Mikhail E.; Popov, Eugeni O.
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Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteYuan, Zuhao; Li, Yong; She, Pengcheng; Gong, Jun; Shi, Renping; He, Qiufu; Liu, Fangting; Li, Junhui
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Ultralow-pressure inductively coupled plasma etching of high-aspect-ratio SiO2 structures: Mitigation of transport-limited etching and stable profile control
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteWei, Jiachen; Yang, Chen; Kim, Kyong-Nam; Kwon, Kwang-Ho
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On the contrast mechanism of scanning microwave impedance microscopy on buried and doped features
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteMagnarin, Lorenzo Andrea; Caligaris, Filippo Ozino; Moran-Meza, Jose; Aghassi-Hagmann, Jasmin; Celano, Umberto
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Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteGamachchi, Dilan M.; Ziemke, Carson D.; Miller, Jackson M.; Davison, Harrison C.; Vandendaele, Wyatt B.; Denn, Patricia A.; Stoddard, Bryce D.; Davidson, Carter T.; Aurora, Vishvi N.; Stalla, David; Niavol, Somayeh Saadat; Meng, Andrew C.
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Blade coating-based scalable assembly of electronically active, solution-processed 2D semiconductors
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteHong, Jiwon; Song, Okin; Kang, Joohoon
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Impact of ammonia flow rate on nonradiative recombination centers and localized states grown in InGaN multiquantum wells
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteFan, Ziqi; Liang, Feng; Yang, Jing; Liu, Zongshun; Hou, Yufei; Zhang, Yuheng; Yang, Qian; Zhao, Degang
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Diffusion-isolated pressure equilibration for multigas refractometry
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteSilander, I.; Zakrisson, J.; Axner, O.; Zelan, M.
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Adaptive simulation framework for dynamic shadow mask optimization in physical vapor deposition of optical coatings
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteReyes Ramirez, Bartolome; Carballo Manuel, Claudia; Cervantes-Lozano, Joel; Gonzalez Galicia, Miguel Angel; Mansurova, Svetlana; Korneev, Nikolai
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Modular mobile sample holder for transport measurements in liquid-helium-free cryostats
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteIlin, Eduard; Colla, Eugene V.; Burkova, Irina
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Optimizing photoresist linewidth roughness in ion beam shaping: A systematic study of stage angular configuration
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteWu, Xiaojian; Dong, Shuo; Xu, Kaidong; Zhuang, Shiwei
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Study on the imaging of bright-field and dark-field for contact holes in extreme ultraviolet lithography considering stage vibration effects
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteShen, Hao; Zhang, Libin; Wang, Jiashuo; Rui, Dinghai; Su, Yajuan; Wei, Yayi
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Fully dry-processed positive-tone electron beam lithography using myo-inositol
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteSmith, R. D.; Scherer, A.
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Influence of Ar ion beam on WSe2 and resulting contact interfaces in 2D field-effect transistors
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteHolmes, Samantha K.; Zhang, Baiyu; Ravel, Victoria M.; Doherty, James L.; Smith, Brittany N.; Franklin, Aaron D.
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Color-tuning of InGaN quantum discs by molecular beam epitaxy
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteVafadar, Mohammad Fazel; Radford, Melissa; Kavanagh, Karen L.; Zhao, Songrui
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Dual-gate Hf-doped InZnO field-effect transistors with sub-0.1 V threshold voltage shift under bias stress
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteLi, Tiaoyang; Hu, Rongling
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Effect of hydrogen annealing on the hydrogen sensing response of palladium thin films
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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deleteTang, Zheng; Jiao, Yizhou; Feng, Le; Zhang, Qiaogen; Fu, Zhong; Hu, Kai; Hu, Dan; Zhao, Aihua
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Ag-doping induced enhancement in power factor of flexible n-type Bi2Te2.7Se0.3 thin films
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteTian, Xujiang; Wu, Chonghao; Ma, Congming; Liang, Shaojun; Zhu, Hanming; Yue, Song
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Multiphysics simulation of non-uniform magnetic fields' effect on plasma uniformity in capacitively coupled plasmas
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-05-01
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PREAI
deleteCui, Yu-Meng; Liu, Ze-Xuan; Zhang, Si-Bo; Chen, Long; Zhang, Quan-Zhi
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