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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

IF1.2
Papers78
Citations
Journal Papers 76
Publication Date
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Optimization of key process parameters for cobalt sputtering in 0.11 μm CMOS devices
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-03-01
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deleteWang, Furong; Xu, Shaohui; Song, Zhenhua; Zhang, Yan; Zhou, Yaohui; Li, Mincheng
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Highly selective anisotropic dry etching of smooth SiO2 nanostructures using SF6 plasma and Cr hard mask: Toward sustainable plasma etching
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IF1.2
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deleteBernet, Marc; Buchwald, Kristian; Noddegaard, Dines; Hubner, Jorg; Taboryski, Rafael; Jansen, Henri
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Flow behavior of expanding ytterbium vapor jet through rectangular nozzles in the transition regime
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
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deleteMazumder, Anik; Alangi, Nagaraj; Garg, Tarang; Sethi, Sanjay; Bhandarkar, Upendra; Dasgupta, Kinshuk; Agrawal, Amit
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Simulation and deposition experimental study of a microwave plasma chemical vapor deposition device with an oblique cone structure design
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IF1.2
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deleteHu, Jibo; Zhu, Xiaoxiang; Zhao, Shusen; Wang, Huibin; Zhao, Yapei
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Effect of carbon nanotube reinforcement on the tribological behavior of fiber composites in vacuum environments
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
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deleteKara, Levent; Boztoprak, Yalcin; Sert, Yasar
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Hydrogen adsorption on nitrogen-doped graphene in the presence of water: An atomistic study
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IF1.2
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deleteNosirov, Mirjalol; Meyliyeva, Anora; Ramazanova, Umida; Yusupov, Maksudbek; Berdiyorov, Golibjon R.; Rakhimov, Khamdam
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Insights into the native structure of polyurea thickened lubricating grease via a multi-technique approach
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-03-01
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deleteWang, Xiao Yuan L.; Parmenter, Christopher D. J.; Kotowska, Anna M.; Watts, Julie A.; De Focatiis, Davide S. A.; Rance, Graham A.; Scurr, David J.; Irvine, Derek J.
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Characterizing the stability of poly-ethylene glycol surface coatings as a function of environmental conditions for micropatterning applications
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IF1.2
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deleteJacobsen, Nadav; Ben-Asher, Noa; Engel, Leeya
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Tandem mass spectrometry dissociation of large oligomer ions produced by argon cluster ion beams secondary ion mass spectrometry
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IF1.2
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deleteHoussiau, Laurent; Oki, Rika; Seki, Toshio; Matsuo, Jiro
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Analysis of particle defects on cleaned GaSb substrates
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IF1.2
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deleteBai, Yihan; Zhao, Youwen; Li, Chenhui; Yang, Wenwen; Lv, Xinyu; Fan, Jiangtao; Shen, Guiying
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Design and optimization of a novel nonevaporable getter pump geometry
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
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deleteLuo, Xueli; Tantos, Christos; Hanke, Stefan; Giegerich, Thomas
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Epoxy outgassing analysis by thermal desorption gas chromatography
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IF1.2
delete2026-03-01
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deleteInman, Levi; Warner, Hailee; Wang, Yun-Yu; Liu, Naiming; Zanoya, Rob; Jin, Qiang
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Thank you to our 2025 reviewers!
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IF1.2
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deleteAydil, Eray S.
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Effect of lithiation on the optical and electrical properties of chloroaluminum phthalocyanine thin films
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
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deleteKabore, Z.; Abdel Samad, B.
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Maxwell design of the magnetic field in an unbalanced magnetron system for optimization toward sputtering of Al-Si alloy
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-03-01
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deleteSu, Zhiwei; Yan, Caibo; Liu, Yaoyao; Zhou, Yanwen
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Water-assisted secondary ion mass spectrometry using gas cluster ion beams
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IF1.2
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deleteSheraz, Sadia; Buttery, Lola; Lockyer, Nicholas P.
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Improvement and optimization of AZO/Ag/Ni/AZO multilayer transparent conductive films
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
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deleteYoshikawa, Nene; Nakamura, Hoshina; Yoshimura, Yukio; Imamura, Yuki; Nitta, Atsushi
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Cesium-adsorbed nanometer-thick TiO2 channel thin-film transistors for enhanced drain currents
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-03-01
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deleteMiyazawa, Ryo; Takami, Tsubasa; Miura, Masanori; Ahmmad, Bashir; Hirose, Fumihiko
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Mechanisms of stress control in SiNx membranes under gas cluster ion beam irradiation
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-03-01
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deleteTakeuchi, Masaya; Toyoda, Noriaki
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Quantitative scanning capacitance microscopy enabled by machine learning and electrostatic modeling
deleteJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
IF1.2
delete2026-03-01
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deleteHo, Sheng-Zhu; Wen, Si-An; Chen, Yi-Chun; Gui, Dong; Hu, Wei-Shan
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