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Micro and Nano Engineering cover

Micro and Nano Engineering

IF3.1
Papers113
Citations692
Journal Papers 108
Publication Date
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Process-aware EBL-enabled prototyping of a large-wafer-scale LWIR metalens
deleteMicro and Nano Engineering
IF3.1
delete2026-10-05
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deleteWeilin Jin; Gaochen Dong; Zixuan Wang; Jinhao Liang; Kian Shen Kiang; Jize Yan
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Top-down fabrication of TiN nanogap electrodes via lithographic patterning and plasma-assisted dimensional transfer
deleteMicro and Nano Engineering
IF3.1
delete2026-09-30
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deleteSaadman Abedin; Peggy Reich; Jörn Pezoldt; Katharina Freiberg; Heike Bartsch; Jens Müller; Doris Heinrich; Jörg Pezoldt
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Effect of PEDOT channel thickness on ionic concentration discrimination in organic electrochemical transistors
deleteMicro and Nano Engineering
IF3.1
delete2026-09-27
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deleteNoemi Cesario; Martina Paraggio; Natalia Malara; Nicola Coppedé; Francesco Gentile
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All-dry stencil patterning of IGZO thin films with micrometer-scale resolution and electrical validation
deleteMicro and Nano Engineering
IF3.1
delete2026-09-10
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deleteChenxiang Zhang; Mounir Driss Mensi; Giovanni Boero; Arnaud Bertsch; Juergen Brugger
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Plasma-induced roughening of inclined polymeric surfaces: Morphological analysis and assessment
deleteMicro and Nano Engineering
IF3.1
delete2026-09-01
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PREAI
deleteKastania, Athina S.; Mouchtouris, Sotiris; Stai, Eleni; Constantoudis, Vassilios; Kokkoris, George; Schider, Gerburg; Borstner, Daniel; Melchior, Philipp; Nees, Dieter; Stadlober, Barbara; Gogolides, Evangelos; Tserepi, Angeliki
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Design and feasibility of strain FET based on TMD heterostructure
deleteMicro and Nano Engineering
IF3.1
delete2026-09-01
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PREAI
deleteVajjula, Nigama; Gebeyehu, Fitunerediate G.; Ko, Youngsang; Jung, Yeonwoong; Ahn, Ethan C.
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Geometry-tuned inertial microfluidics for label-free enrichment of CTC-sized cells in serpentine microchannels
deleteMicro and Nano Engineering
IF3.1
delete2026-09-01
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PREAI
deleteAkar, Unal; Ceylan, Ramazan; Aciksari, Aysegul; Kestek, Ezgi; Kutlu, Ozlem; Cetinel, Sibel; Ghorbani, Morteza; Kosar, Ali
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Two-photon lithography-based fabrication of 3D fibrous scaffolds: Addressing anisotropic voxel constraints for the design of bio-inspired scaffolds
deleteMicro and Nano Engineering
IF3.1
delete2026-08-08
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deleteAída Gabriela Fernández Contreras; Inès Paysan; Chloé Viat; Ayla Biallas; Olivier Stephan; Boudewijn van der Sanden; Jean-Hervé Tortai; Alice Nicolas
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Waste-derived cellulose/ZnO@MWCNTs hybrid platform for electrochemical detection of tetracycline
deleteMicro and Nano Engineering
IF3.1
delete2026-08-06
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deleteJihene Belhaj; Rayhane Zribi; Viviana Bressi; Ramzi Khiari; Giovanni Neri; Claudia Espro
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Selective Laser Etching technology for reconfigurable microfluidic and electrochemistry-on-chip
deleteMicro and Nano Engineering
IF3.1
delete2026-08-04
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deleteInès Muguet; David Bourrier; Pierre-François Calmon; Pierre Lapèze; Pierre Joseph; Morgan Delarue
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Standing waves-induced surface roughness in grayscale lithography
deleteMicro and Nano Engineering
IF3.1
delete2026-08-04
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deleteHedir Melissa; Picca Axel; Gerges Nadine; Rahali Ayoub; Denaix Lou; Carcenac Alexis; Gousset Silvère; Ferrec Yann; Gourgon Cécile
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Systematic study of calibration pattern design for reliable grayscale lithography
deleteMicro and Nano Engineering
IF3.1
delete2026-08-03
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deleteP. Tian; D. Kazazis; Y. Ekinci
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Effective mid-range correction for improving spatial gap uniformity in dense TLM structures on InP substrates
deleteMicro and Nano Engineering
IF3.1
delete2026-08-01
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PREAI
deleteZhang, Hao; Becker, Jing; Ebbert, Jan; Mueller, Konrad; Kahilogullari, Tekin; Possberg, Alexander; Ritter, Daniel; Liborius, Lisa; Haeuser, Patrick; Weimann, Nils
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Electrical performance of the perovskite solar cells with 3D patterned layers
deleteMicro and Nano Engineering
IF3.1
delete2026-08-01
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PREAI
deleteAleksandrova, Mariya; Tsanev, Tsvetozar; Tomov, Rade; Paunov, Yordan; Alexandrov, Dimiter
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Planar Zn metasurfaces formed through localized O2 plasma treatment for optically transparent RF shielding
deleteMicro and Nano Engineering
IF3.1
delete2026-08-01
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PREAI
deleteHowe, Thomas M.; Sun, Kai; Muskens, Otto L.; de Groot, C. H. (Kees)
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Recent advances in adapting ionic liquid ion sources to focused ion beams technologies
deleteMicro and Nano Engineering
IF3.1
delete2026-08-01
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PREAI
deleteBerdague, Philippe; Lesot, Philippe; Bouville, David; Villebasse, Cedric; Gierak, Jacques
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Modified Poisson-Boltzmann analysis of ion concentration and capacitance in confined electrolytic microchannels
deleteMicro and Nano Engineering
IF3.1
delete2026-08-01
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PREAI
deleteEhsan, Usama; Bartzis, Vasileios; Karakasidis, Theodoros; Sarris, Ioannis
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Fabrication of planar full-SiC-based nanostructured multi-electrode arrays (MEA) for neural interfaces☆
deleteMicro and Nano Engineering
IF3.1
delete2026-08-01
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PREAI
deleteIacovella, Fabrice; Greenhorn, Scott; Pound-Lana, Gwenaelle; Labbe, Lucas; Labau, Sebastien; Petit-Etienne, Camille; Quesnel-Hellmann, Anne; Mehr, Fabien; Uvarov, Andrei; Zielinski, Marcin; Rousseau, Lionel; Bassani, Franck; Irar, Mohammed; Hebert, Clement; Yvert, Blaise; Zekentes, Konstantinos; Bano, Edwige; Gourgon, Cecile; Boussey, Jumana
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An enhanced print-pause-print strategy for modular stereolithography microfluidics with embedded optical access and functional integration
deleteMicro and Nano Engineering
IF3.1
delete2026-07-10
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deleteAlexandra Rolland; Aline Cerf; Christophe Vieu; Hervé Aubert; Zacchari Ben Meriem
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Quantifying reduced negative ion contributions in nano-confined SiO2 wet etching via reaction-pathway analysis
deleteMicro and Nano Engineering
IF3.1
delete2026-07-06
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deleteDai Ueda; Akiko Harumoto
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