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Journal of Micromechanics and Microengineering cover

Journal of Micromechanics and Microengineering

IF2.1
Papers170
Citations8671
Journal Papers 170
Publication Date
Etch rate enhancement of a DRIE process for fabrication of silicon micropillar arrays
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deletePourhedayat Ganji, Alireza; Firoozabadi, Seyed Ahmadreza; Bouloorchi Tabalvandani, Mohammadjavad; Pourmand, Mohammad; Badieirostami, Majid
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Numerical simulation and structural optimization of serpentine curved micromixer
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deleteFeng, Qiaoyu; Wang, Junsheng; Huang, Xutai; Ren, Quanzhou
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High attenuation structured porous silicon backing for high-frequency ultrasound transducer applications
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deleteDefforge, Thomas; Calle, Samuel; Vander Meulen, Francois; Capri, Arnaud; Gautier, Gael; Levassort, Franck
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Nanopositioning mechanism for microfluidic repulsion sorting applications
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deleteAl-Fandi, Mohamed; Alkhawaldeh, Sara; Khashan, Saud; Al-Ebbini, Lina M. K.
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A clogging-free microfluidic impedance and imaging flow cytometry based on three-dimensional hydrodynamic focusing
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deleteLi, Yimin; Fang, Tingxuan; Chen, Xiao; Wang, Junbo; Huo, Xiaoye; Li, Yueying; Zhang, Yi; Chen, Jian
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Microtexture-based passive hydrophobic burst valves in polymeric microfluidics fabricated by femtosecond laser texturing and injection molding
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deleteRehman, Mian Monib Ur; Evens, Tim; Verbist, Wannes; Lammertyn, Jeroen; Bael, Albert Van; Castagne, Sylvie
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A novel friction test device for nanoscale gap surfaces with sandwiched lubricant
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deleteYagi, Wataru; Xia, Yuanlin; Tsuchiya, Toshiyuki; Yamashita, Naoki; Hirayama, Tomoko
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Research on femtosecond laser direct writing-based thermally induced shrinkage process
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deleteXie, Yu; Liu, Yongkang; Chen, Jianxiong; Chen, Hui; Hong, Shujin
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ALD alumina (Al2O3)-enabled wafer-level anodic bonding of LTCC and SOI for MEMS integration
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deleteYildiz, Fikret; Ozyigit, Dogu Kaan Bugra; Mahmood, Muhammad Rashid; Nakamura, Daisuke; Weidlinger, Gunther; Aumaier, Julian; Wernicke, Tobias
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A face-sealing, reusable microfluidic connector geared for automation
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deleteNiketa, A. K.; Hamid, Saima; Naveen, Kumar K. R.; Prajapati, Ekta; Kumar, Shishir
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Design and simulation of microbolometer-adapted micro-Pirani gauges for vacuum monitoring
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deleteXia, Hexin; Roy, Avisek; Gustavsen, Kim Robert; Bardalen, Eivind; Nguyen, Hoang-Vu; Ohlckers, Per; Aasmundtveit, Knut Eilif
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