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IEEE International Symposium on Robotic and Sensors Environments
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Delving into Conversion Effects in 0.5 μm Thin Film Aluminum Nitride MEMS Devices
2024 IEEE INTERNATIONAL SYMPOSIUM ON ROBOTIC AND SENSORS ENVIRONMENTS, ROSE 2024
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2024-06-20
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Trigona, Carlo; Almani, Suhail Ahmed; Mehdi, Alireza; Salerno, Giuliano A.; Strano, Vincenzina; Bartasyte, Ausrine; Margueron, Samuel; Baglio, Salvatore; Micard, Quentin
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