Not logged inElectron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
Eremin, Denis; Engel, Dennis; Krueger, Dennis; Wilczek, Sebastian; Berger, Birk; Oberberg, Moritz; Woelfel, Christian; Smolyakov, Andrei; Lunze, Jan; Awakowicz, Peter; Schulze, Julian; Brinkmann, Ralf Peter .png)
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SaveElectron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation resultsBerger, B.; Eremin, D.; Oberberg, M.; Engel, D.; Woelfel, C.; Zhang, Q-Z; Awakowicz, P.; Lunze, J.; Brinkmann, R. P.; Schulze, J. Share Save Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo codeEremin, D.; Berger, B.; Engel, D.; Kallaehn, J.; Koehn, K.; Krueger, D.; Xu, L.; Oberberg, M.; Woelfel, C.; Lunze, J.; Awakowicz, P.; Schulze, J.; Brinkmann, R. P. Share Save Share Save Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processesRoggendorf, J.; Berger, B.; Eremin, D.; Oberberg, M.; Engel, D.; Woelfel, C.; Zhang, Quan-Zhi; Awakowicz, P.; Lunze, J.; Schulze, J. Share Save Share Save Share Save Share Save Share Save Share Save Share Save The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O2Oberberg, M.; Berger, B.; Buschheuer, M.; Engel, D.; Woelfel, C.; Eremin, D.; Lunze, J.; Brinkmann, R. P.; Awakowicz, P.; Schulze, J. Share Save Share Save Share Save Share Save Share Save Share Save Share Save Share Save Share Save 
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