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Digital Etching of Molybdenum Interconnects Using Plasma Oxidation Erofeev, Ivan; Hartanto, Antony Winata; Khan, Muhaimin Mareum; Deng, Kerong; Kumar, Krishna; Aabdin, Zainul; Tjiu, Weng Weei; Zhang, Mingsheng; Pacco, Antoine; Philipsen, Harold; Chowdhuri, Angshuman Ray; Huynh, Han Vinh; Holsteyns, Frank; Mirsaidov, Utkur Share Save
Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions Deng, Kerong; Erofeev, Ivan; Chowdhuri, Angshuman Ray; Philipsen, Harold; Aabdin, Zainul; Hartanto, Antony Winata; Tjiu, Weng Weei; Zhang, Mingsheng; Fernando, Devshan; Saidov, Khakimjon; Kumar, Krishna; Pacco, Antoine; Holsteyns, Frank; Huynh, Han Vinh; Mirsaidov, Utkur Share Save
Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification Lozano, D. P.; Mongillo, M.; Piao, X.; Couet, S.; Wan, D.; Canvel, Y.; Vadiraj, A. M.; Ivanov, Ts; Verjauw, J.; Acharya, R.; Van Damme, J.; Mohiyaddin, F. A.; Jussot, J.; Gowda, P. P.; Pacco, A.; Raes, B.; van de Vondel, J.; Radu, I. P.; Govoreanu, B.; Swerts, J.; Potocnik, A.; De Greve, K. Share Save
Controlling the Wet-Etch Directionality in Nanostructured Silicon Aabdin, Zainul; Ghosh, Tanmay; Pacco, Antoine; Raj, Sanoj; Do, Hue Thi Bich; Saidov, Khakimjon; Tjiu, Weng Weei; Anand, Utkarsh; Kral, Petr; Holsteyns, Frank; Bosman, Michel; Mirsaidov, Utkur Share Save
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