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Benjamin Groven

imec

19H-index
87Paper Count
1.2KCitation Count
Published Papers 16
Publication Date
Growth behavior during metalorganic chemical vapor deposition of MoS2 using di-tert-butyl sulfide as organic sulfur precursor
err2026-01-16
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errOAAI
errJ H (Sanne) Deijkers; H Medina Silva; A Manasi; S Pasko; W M M (Erwin) Kessels; A J M Mackus; B Groven; A Delabie
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Inherently Selective and Anisotropic Ruthenium Deposition on the Basal Plane of Single-Layer Transition Metal Dichalcogenide Crystals
err2025-10-09
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PREAI
errAnsh; Esmee Roman; Iryna Kandybka; Akhilesh Kumar Mandal; Benjamin Groven; Luca Mana; Johan Meersschaut; Pierre Morin; Annelies Delabie
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Metal–organic chemical vapour deposition for 2D chalcogenides
err2025-09-11
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PREAI
errXiaotian Zhang; Nicholas Trainor; Thomas V. Mc Knight; Andrew R. Graves; Zhenhua Wu; Lei Xu; Xudong Zheng; Tianyi Zhang; Jiadi Zhu; Tomás Palacios; Jing Kong; Benjamin Groven; Bobo Tian; Chungang Duan; Junhao Chu; Joan M. Redwing
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Toward characterization and assessment of MoS2 fundamental device properties by photoluminescence
err2025-07-01
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errOAAI
errNuytten, Thomas; Minj, Albert; Sergeant, Stefanie; Smets, Quentin; Brems, Steven; Kumar, Pawan; Ghosh, Souvik; Schram, Tom; Banerjee, Sreetama; Kruv, Anastasiia; van Dorp, Dennis; Groven, Benjamin; Morin, Pierre
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Process-Induced Modulation of Domain Orientations during WS2 Epitaxy by Metal-Organic Chemical Vapor Deposition on Sapphire
err2024-09-04
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PREAI
errVerdin, Joris; Silva, Henry Medina; Mehta, Ankit Nalin; Kandybka, Iryna; Groven, Benjamin; Kumar, Pawan; Koylan, Serkan; Sergeant, Stefanie; Favia, Paola; Morin, Pierre; Delabie, Annelies
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Top-Gate Stack Engineering Featuring a High-κ Gadolinium Aluminate Interfacial Layer for Field-Effect Transistors Based on Two-Dimensional Transition-Metal Dichalcogenides
err2024-05-24
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PREAI
errLin, Zaoyang; Wu, Xiangyu; Cott, Daire; Shi, Yuanyuan; Silva, Henry Medina; Sergeant, Stefanie; Conard, Thierry; Meersschaut, Johan; Mehta, Ankit Nalin; Groven, Benjamin; Morin, Pierre; Asselberghs, Inge; de la Rosa, Cesar Javier Lockhart; Kar, Gouri Sankar; Lin, Dennis; Delabie, Annelies
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Chemical Vapor Deposition of a Single-Crystalline MoS2 Monolayer through Anisotropic 2D Crystal Growth on Stepped Sapphire Surface
err2024-01-18
err6
PREAI
errKandybka, Iryna; Groven, Benjamin; Silva, Henry Medina; Sergeant, Stefanie; Mehta, Ankit Nalin; Koylan, Serkan; Shi, Yuanyuan; Banerjee, Sreetama; Morin, Pierre; Delabie, Annelies
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Conductivity Enhancement in Transition Metal Dichalcogenides: A Complex Water Intercalation and Desorption Mechanism
err2023-05-17
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errOAAI
errSerron, Jill; Minj, Albert; Spampinato, Valentina; Franquet, Alexis; Rybalchenko, Yevhenii; Boulon, Marie-Emmanuelle; Brems, Steven; Silva, Henry Medina; Shi, Yuanyuan; Groven, Benjamin; Villarreal, Renan; Conard, Thierry; van der Heide, Paul; Hantschel, Thomas
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Correlated Intrinsic Electrical and Chemical Properties of Epitaxial WS2 via Combined C-AFM and ToF-SIMS Characterization
err2023-01-03
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errOAAI
errSpampinato, Valentina; Shi, Yuanyuan; Serron, Jill; Minj, Albert; Groven, Benjamin; Hantschel, Thomas; van der Heide, Paul; Franquet, Alexis
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Engineering Wafer-Scale Epitaxial Two-Dimensional Materials through Sapphire Template Screening for Advanced High-Performance Nanoelectronics
err2021-05-27
err38
PREAI
errShi, Yuanyuan; Groven, Benjamin; Serron, Jill; Wu, Xiangyu; Mehta, Ankit Nalin; Minj, Albert; Sergeant, Stefanie; Han, Han; Asselberghs, Inge; Lin, Dennis; Brems, Steven; Huyghebaert, Cedric; Morin, Pierre; Radu, Iuliana; Caymax, Matty
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Epitaxial registry and crystallinity of MoS2 via molecular beam and metalorganic vapor phase van der Waals epitaxy
err2020-07-20
err15
PREAI
errMortelmans, Wouter; El Kazzi, Salim; Groven, Benjamin; Mehta, Ankit Nalin; Balaji, Yashwanth; De Gendt, Stefan; Heyns, Marc; Merckling, Clement
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Grain-Boundary-Induced Strain and Distortion in Epitaxial Bilayer MoS2 Lattice
err2020-02-21
err21
errOAAI
errMehta, Ankit Nalin; Mo, Jiongjiong; Pourtois, Geoffrey; Dabral, Ashish; Groven, Benjamin; Bender, Hugo; Favia, Paola; Caymax, Matty; Vandervorst, Wilfried
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Chemical vapor deposition of monolayer-thin WS2 crystals from the WF6 and H2S precursors at low deposition temperature
err2019-03-11
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errOAAI
errGroven, B.; Claes, D.; Mehta, A. Nalin; Bender, H.; Vandervorst, W.; Heyns, M.; Caymax, M.; Radu, I.; Delabie, A.
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Two-Dimensional Crystal Grain Size Tuning in WS2 Atomic Layer Deposition: An Insight in the Nucleation Mechanism
err2018-09-17
err65
errOAAI
errGroven, Benjamin; Mehta, Ankit Nalin; Bender, Hugo; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Conard, Thierry; Smets, Quentin; Schram, Tom; Schoenaers, Ben; Stesmans, Andre; Afanas'ev, Valeri; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies
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Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties
err2017-05-31
err48
PREAI
errPopovici, Mihaela; Groven, Benjamin; Marcoen, Kristof; Quan Manh Phung; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; van den Berg, Jaap A.; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Malgorzata; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph
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Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS2 from WF6, H2 Plasma, and H2S
err2017-03-16
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errOAAI
errGroven, Benjamin; Heyne, Markus; Mehta, Ankit Nalin; Bender, Hugo; Nuytten, Thomas; Meersschaut, Johan; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies
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