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M

M.M.J. van de Wal

asml holding

5H-index
28Paper Count
72Citation Count
Published Papers 4
Publication Date
Optimal thermal actuation for mirror temperature control?
err2022-08-01
err3
errOAAI
errVeldman, D. W. M.; Nouwens, S. A. N.; Fey, R. H. B.; Zwart, H. J.; van de Wal, M. M. J.; van den Boom, J. D. B. J.; Nijmeijer, H.
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Optimal Thermal Actuation for Mitigation of Heat-Induced Wafer Deformation
err2021-03-01
err4
errOAAI
errVeldman, Daniel W. M.; Fey, Rob H. B.; Zwart, Hans; van de Wal, Marc M. J.; van den Boom, Joris D. B. J.; Nijmeijer, Henk
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Iterative pole-zero finite element model updating using generic parameters
err2018-11-01
err2
PREAI
errDorosti, M.; Fey, R. H. B.; Heertjes, M. F.; van de Wal, M. M. J.; Nijmeijer, H.
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Semi-analytic approximation of the temperature field resulting from moving heat loads
err2018-07-01
err19
errOAAI
errVeldman, D. W. M.; Fey, R. H. B.; Zwart, H. J.; van de Wal, M. M. J.; van den Boom, J. D. B. J.; Nijmeijer, H.
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