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M

Michael James Johnson

United States Navy

0H-index
2Paper Count
0Citation Count
Published Papers 1
Publication Date
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Modeling remote inductively coupled plasmas for plasma-enhanced atomic layer deposition
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2026-03-01
err0
PREAI
errMeyer, Mackenzie E.; Boris, David R.; Johnson, Michael J.; Kushner, Mark J.; Walton, Scott G.
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Co-authors
Cooperation Journals
M
Mark J. Kushner
H-index: 77 · Papers: 874
D
David R. Boris
H-index: 22 · Papers: 120
M
Mackenzie Elizabeth Meyer
H-index: 0 · Papers: 2
S
S. Walton
H-index: 0 · Papers: 6
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