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S. Walton

United States Navy

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6Paper Count
0Citation Count
Published Papers 2
Publication Date
Modeling remote inductively coupled plasmas for plasma-enhanced atomic layer deposition
err2026-03-01
err0
PREAI
errMeyer, Mackenzie E.; Boris, David R.; Johnson, Michael J.; Kushner, Mark J.; Walton, Scott G.
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Thermal and mechanical behavior of plasma-synthesized, nanometer scale aluminum fluoride passivation layers
err2026-02-28
err0
PREAI
errMotezaker, Mohsen; Jones, Andrew H.; Boris, David R.; Walton, Scott G.; Hopkins, Patrick E.
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