Canyam
AI summaries for academic research
Home
Preprint
Subscribe
Favorites
Tools
Analysis
Summary
Not logged in
Back
V
Ventzek, Peter
tokyo electron ltd
0
H-index
1
Paper Count
0
Citation Count
0
Related Insights
Subscribe
Published Papers
1
Publication Date
Publication Date
Impact Factor
Citations
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
IF
2.1
2026-05-01
0
PRE
AI
Conlin, Patrick; Sridhar, Shyam; Ventzek, Peter
Share
Save
Research Directions
No research directions
Co-authors
Cooperation Journals
P
Patrick Conlin
H-index: 9 · Papers: 32
S
Shyam Sridhar
H-index: 8 · Papers: 27
All loaded
.png){kind=icon}
.png){kind=icon}
.png){kind=icon}
.png){kind=icon}
.png){kind=icon}
Share.png){kind=icon}
SaveShareSaveShareSave
Not logged in.png){kind=icon}
ShareSaveNot logged inShareSave