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Nonchemically-Amplified Molecular Resists Based on Calixarene Derivatives Enabling 14 nm Half-Pitch Nanolithography Peng, Rongrong; Chen, Jinping; Yu, Tianjun; Zeng, Yi; Wang, Shuangqing; Guo, Xudong; Hu, Rui; Tian, Peng; Vockenhuber, Michaela; Kazazis, Dimitrios; Zhao, Jun; Wu, Yanqin; Ekinci, Yasin; Yang, Guoqiang; Li, Yi Share Save
Performance Optimization of Sulfonium-Functionalized Molecular Resists for EUV and Electron Beam Lithography Liu, Zhuoran; Chen, Jinping; Yu, Tianjun; Zeng, Yi; Guo, Xudong; Wang, Shuangqing; Hu, Rui; Vockenhuber, Michaela; Tian, Peng; Kazazis, Dimitrios; Ekinci, Yasin; Yang, Guoqiang; Li, Yi Share Save
Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da) Saifullah, Mohammad S. M.; Rajak, Anil Kumar; Hofhuis, Kevin A.; Tiwale, Nikhil; Mahfoud, Zackaria; Testino, Andrea; Karadan, Prajith; Vockenhuber, Michaela; Kazazis, Dimitrios; Valiyaveettil, Suresh; Ekinci, Yasin Share Save
Optimization strategy for epoxy cross-linked molecular glass photoresist in EUV lithography Gao, Jiaxing; Zhang, Siliang; Cui, Xuewen; Cong, Xue; Guo, Xudong; Hu, Rui; Wang, Shuangqing; Chen, Jinping; Li, Yi; Tian, Peng; Vockenhuber, Michaela; Kazazis, Dimitrios; Ekinci, Yasin; Yang, Guoqiang Share Save
EUV-induced hydrogen desorption as a step towards large-scale silicon quantum device patterning Constantinou, Procopios; Stock, Taylor J. Z.; Tseng, Li-Ting; Kazazis, Dimitrios; Muntwiler, Matthias; Vaz, Carlos A. F.; Ekinci, Yasin; Aeppli, Gabriel; Curson, Neil J.; Schofield, Steven R. Share Save
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Resistless EUV lithography: Photon-induced oxide patterning on silicon Tseng, Li -Ting; Karadan, Prajith; Kazazis, Dimitrios; Constantinou, Procopios C.; Stock, Taylor J. Z.; Curson, Neil J.; Schofield, Steven R.; Muntwiler, Matthias; Aeppli, Gabriel; Ekinci, Yasin Share Save
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Charge Configuration Memory Devices: Energy Efficiency and Switching Speed Mraz, Anze; Venturini, Rok; Svetin, Damjan; Sever, Vitomir; Mihailovic, Ian Aleksander; Vaskivskyi, Igor; Ambrozic, Bojan; Drazic, Goran; D'Antuono, Maria; Stornaiuolo, Daniela; Tafuri, Francesco; Kazazis, Dimitrios; Ravnik, Jan; Ekinci, Yasin; Mihailovic, Dragan Share Save
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Linear negative magnetoresistance in two-dimensional Lorentz gases Schluck, J.; Hund, M.; Heckenthaler, T.; Heinzel, T.; Siboni, N. H.; Horbach, J.; Pierz, K.; Schumacher, H. W.; Kazazis, D.; Gennser, U.; Mailly, D. Share Save
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