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J

Journal of Microelectromechanical Systems

IF3.1
论文数126
被引数
期刊论文 126
发表时间
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Adaptive Robust Multi-Objective Optimization of Setback Safety Device Considering Multi-Source Uncertainty in Silicon-Based MEMS Technology基于多源不确定性的硅基MEMS技术中安全装置的适应性鲁棒多目标优化
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-29
delete0
PREAI
deleteMo Yang; Weirong Nie; Baolin Cheng; Shenghong Lei; Junlin Lu; Leong Hien Poh; Yun Cao; Zhanwen Xi
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Si-Based Sealing Layers for Low-Temperature Thin-Film Packaging of MEMSSi基密封层用于MEMS低温薄膜封装
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-26
delete0
deleteOAAI
deleteAnna Persano; Alvise Bagolini; Pasquale Cretì; David Novel; Fabio Quaranta
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Novel Type of Anchoring for Polysilicon-Based Movable Microstructures With Highly Improved Mechanical Resilience基于多晶硅的新型锚定方式，具有显著提升的机械恢复力可移动微结构
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-23
delete0
deleteOAAI
deleteT. Lisec; N. Clausen; F. Klingbeil; B. Jensen; B. Gojdka
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A Two Tip MEMS Array Nanopositioner for High Throughput STM双探针MEMS阵列纳米定位器用于高通量扫描隧道显微镜
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-19
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PREAI
deleteEmma Fowler; S. O. Reza Moheimani
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A High-Symmetry Micro-Shell Whole-Angle Gyroscope With Time-Multiplexed Analog Front-End ASIC高对称性微壳全角陀螺仪与时间复用模拟前端ASIC
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-19
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PREAI
deleteYuchen Wang; Jun Feng; Ying Ouyang; Youlin Zhang; Sheng Yu; Jiangkun Sun; Yongmeng Zhang; Dingbang Xiao; Xuezhong Wu
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Locally Buried SiO2 for TCF Compensation of LiNbO3 Thickness-Excited Resonators局部埋入SiO₂用于LiNbO₃厚度激发谐振器的TCF补偿
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-12
delete0
PREAI
deleteFlorian Hartmann; Luis Guillermo Villanueva
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Gas Detection Based on Thermal Conductivity Using Auxetic Structures基于负泊松比结构的导热系数气体检测
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-08
delete0
PREAI
deleteWagner Barth Lenz; Rodrigo Tumolin Rocha; Mohammad I. Younis; Carlos A. Grande
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The Film Evaporation MEMS Tunable Array: A Review and Development Status薄膜蒸发MEMS可调谐阵列：综述与发展现状
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-10-08
delete0
PREAI
deleteJesus A. Meza-Galvan; Anthony G. Cofer; Steven Pugia; Katherine Fowee-Gasaway; Stephen Heister; Alina Alexeenko; Khary Parker
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Design, Multiphysics Modeling, and Experimental Characterization of RF AlScN Magnetoelectric Antennas射频AlScN铁电器件天线的设计、多物理场建模与实验表征
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-09-16
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PREAI
deleteNicol Maietta; Samuel Quaresima; Yisi Liu; Onurcan Kaya; Junhao Dong; Mingzhong Wu; Xufeng Zhang; Cristian Cassella
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A Wafer-Level Test Approach for Adhesion and Wear Characterization in MEMS Accelerometers一种用于MEMS加速度计粘附和磨损表征的晶圆级测试方法
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-09-09
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PREAI
deleteLukas Ackermann; Matthew Lewis; Gevorg Aleksanyan; Marvin Freier; Dominic Palm; Jens Anders
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Low-Frequency Pressure-Gradient MEMS Vector Hydrophone Using AlN/ScAlN Composite Films基于AlN/ScAlN复合薄膜的低频压力梯度MEMS矢量水听器
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-20
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PREAI
deleteZhenyao Shi; Rong Dang; Junyang Li; Chenghao Hu; Guojun Zhang; Renxin Wang; Wendong Zhang; Licheng Jia
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A Thermal Convection Tilt Sensor With Synergistic Thermal Control and Adaptive Filtering for Long-Term Drift Suppression一种具有协同热控制与自适应滤波以抑制长期漂移的热对流倾斜传感器
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-20
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PREAI
deleteTingfeng Peng; Mengqi Zheng; Yixuan Zhang; Yuan Wang; Michael Kraft; Huahuang Luo
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Long-Term Frequency Stability of a Dual-Oven MEMS Oscillator Based on a High-Q Lateral Extensional Resonator基于高Q值横向扩展型谐振器的双温箱MEMS振荡器的长期频率稳定性
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-14
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PREAI
deleteMaliha Sultana; Hannaneh Mahdavi; Hamed Atashbar; Hakhamanesh Mansoorzare; Reza Abdolvand
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Experimental Characterization and Optimization of Palladium-Coated Laterally Vibrating Resonators for High-Sensitivity Hydrogen Sensing钯涂层横向振动谐振器的实验表征与优化用于高灵敏度氢气传感
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-08-12
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PREAI
deleteGaia Giubilei; Farah Ben Ayed; Pietro Simeoni; Zhenyun Qian; Matteo Rinaldi
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Toward Mem-Re-Sensors: Memristor-Like Pinched Hysteresis in an Open-Loop MEMS Resonator Using Third-Order Duffing Nonlinearity迈向Mem-Re传感器：利用三阶杜芬非线性在开环MEMS谐振器中实现类忆阻器的捏合滞后回线
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-07-23
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PREAI
deleteRyan Leatherbarrow; Erion Uka; Chun Zhao
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Thickness-Field Excited Bimorph Lithium Niobate Piezoelectric Transducer厚度场激励的双晶片铌酸锂压电换能器
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-07-23
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PREAI
deleteVakhtang Chulukhadze; Zihuan Liu; Lezli Matto; Ziqian Yao; Michael Liao; Tzu-Hsuan Hsu; Mark S. Goorsky; Neal Hall; Ruochen Lu
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A MEMS Skewed Oscillating Mirror With Piezoresistive Transduction for Photoacoustic CO2 Gas Detection微机电系统（MEMS）倾斜振荡镜与压阻转换用于光声CO2气体检测
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-22
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PREAI
deleteGaopeng Xue; Yun Liu; Penghong Shi; Mengyuan Wang; Qirun Wang; Yonggang Jiang; Bing Li; Minjie Zhu
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A High-Performance Aluminum Nitride Piezoelectric MEMS Hydrophone With Island Piezo-Patterned Structure高性能氮化铝压电MEMS水听器，具有岛状压电图案结构
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-22
delete0
PREAI
deleteWenhao Li; Zhao Li; Yunchao Qi; Weiwei Cui; Hao Zhang
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Toward Artificial Nociceptors Based on Memristor-Like MEMS Resonator基于类忆阻器MEMS谐振器的仿生痛觉感受器研究
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-12
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PREAI
deleteErion Uka; Chun Zhao
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High Fill-Factor Large-Angle Three-Degree-of-Freedom Vector Scanning Micromirror Array高填充因子大角度三自由度矢量扫描微镜阵列
deleteJournal of Microelectromechanical Systems
IF3.1
delete2026-06-12
delete0
PREAI
deleteManpeng Chang; Yu Jian; Tao Chen; Jiyang Zhang; Chen Liu; Xin Wang; Weimin Wang
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