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IEEE Transactions on Semiconductor Manufacturing

IF2.3
论文数64
被引数
期刊论文 64
发表时间
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Finite Element Simulation of Localized Flip-Chip Thermo-Compression Bonding for GaN-Based Micro-LEDs基于GaN微LED的局部倒装片热压键合有限元模拟
deleteIEEE Transactions on Semiconductor Manufacturing
IF2.3
delete2026-05-01
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deleteWang, Zhihua; Zhang, Kaixin; Yan, Qun; Lin, Chang; Zhou, Xiongtu; Sun, Jie
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Fast Global Sparse Principal Component Analysis for Sensor Reduction in Virtual Metrology快速全局稀疏主成分分析在虚拟计量传感器降维中的应用
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deleteXie, Yifan; Wang, Tianhui; Jeong, Myong K.
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Automating Root Cause Analysis in Semiconductor Manufacturing Using Transformer Models With Explainable AI利用可解释人工智能和Transformer模型自动化半导体制造中的根本原因分析
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deleteAlothman, Youssef; Bader-El-Den, Mohamed; Maurya, Lalit; Amer, Eslam
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A Transformer-Based Sequence Prediction Architecture for Etch Profile Evolution in Semiconductor Manufacturing基于Transformer的半导体制造中刻蚀轮廓演变的序列预测架构
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deleteGuo, Jianming; Ren, Kun; Gao, Dawei; Ni, Dong
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Sample-Efficient Modeling and Optimization of High-Dimensional Semiconductor Processes Using Output-Augmented Gaussian Process Regression and Dynamic Bayesian Optimization样本高效的建模和高维半导体工艺优化：基于输出增强高斯过程回归和动态贝叶斯优化
deleteIEEE Transactions on Semiconductor Manufacturing
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deleteMaheshwari, Om; Mohapatra, Nihar R.
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A Novel Health Index Framework for Semiconductor Equipment Using Multi-View Data基于多视角数据的新型半导体设备健康指数框架
deleteIEEE Transactions on Semiconductor Manufacturing
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deleteAhn, Jeongsun; Cho, Sang-Hyun; Kim, Hong-Yeon; Kim, Hongyeon; Choi, Hyeonjeong; Ham, Dain; Kim, Yongjo; Kim, Hyun-Jung
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Capacity Planning With Cluster Tool Constraints: Aligning Investment and Input Decisions in Research and Development Semiconductor Fabs考虑集群工具约束的产能规划：对半导体晶圆厂研发阶段投资与输入决策的协调
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deleteLee, Jinyoun; Kim, Kihong; Lee, Seungho; Kum, Euiseok
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Cross Domain Anomaly Detection in Semiconductor Manufacturing via Projection Comparison and Reconstruction in Latent Space通过潜在空间中的投影比较与重构进行半导体制造中的跨域异常检测
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deleteLv, Xinwei; Chen, Haiyong; Wang, Zhaoyang
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Critical Roles of Copper Surface Planarity in Achieving Reliable Cu/SiO2 Hybrid Bonding铜表面平面性在实现可靠Cu/SiO2混合键合中的关键作用
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deleteSeo, Kangmin; Kim, Sunjae; Choi, Junyoung; Jang, Suin; Lee, Hoogwan; Kim, Sarah Eunkyung
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AI-Driven Optimization of Thin Film and CMP Processes in 3-D NAND ManufacturingAI驱动的3-D NAND制造中薄膜和化学机械抛光工艺的优化
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deleteYu, Hsiang-Meng; Hsiao, Han-Yu; Hsieh, Meng-Hsun; Yang, Alex; Chang, Yu-Chih; Luoh, Tuung; Hsieh, Jung-Yu; Yang, Ling-Wuu; Yang, Tahone; Chen, Kuang-Chao
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Novel Structure of a Deep Neural Network-Based Material Removal Rate Prediction Model for Multizone Chemical Mechanical Planarization Process Control基于深度神经网络的多区域化学机械平坦化工艺控制材料去除率预测模型的全新结构
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deleteLiu, Bangxu; Zhao, Dewen; Lu, Xinchun; Liu, Yuhong
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Advanced SHG Metrology for Epitaxial SiGe Characterization in Semiconductor Manufacturing高级二次谐波产生计量学在半导体制造中对外延SiGe的表征
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deleteLiu, Zhongming; Liang, Jintai; Zhou, Puxi; Xu, Guangwei; Long, Shibing
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Semi-Damascene FSAV: Via CD and Overlay Process Window Analysis半达姆ascene FSAV：通孔临界尺寸和套准误差工艺窗口分析
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deleteHermans, Yannick; Marti, Giulio; Delie, Gilles; Murdoch, Gayle; Mingardi, Andrea; Halder, Sandip; Wu, Chen; Park, Seongho; Tokei, Zsolt
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Computational Modeling and Optimization of Large-Area Showerhead Configurations in PECVD ReactorsPECVD反应器中大面积喷淋头构型的计算建模与优化
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deleteBarakat, Emad; Kim, Yeonchan; Hong, Joo Pyo; Park, Seungkyung
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Suppressing Hexagonal Defects in Ex Situ Remote Plasma Dry Etch Processing抑制原位远程等离子体干法刻蚀过程中的六方缺陷
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deleteCheng, Kangjian; Huang, Jingyan; Lew, Wen Siang
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Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening高速层流空气幕装置在FOUP门开启期间EFEM气流偏转条件下的除湿隔离效果
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deleteWen, Chi-Jen; Lin, Tee; Ali Zargar, Omid; Hsieh, Chi-Huan; Hu, Shih-Cheng; Shih, Yang-Cheng; Leggett, Graham
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Online Temperature Monitoring System for Semiconductor Automated Test Equipment Using Local Gaussian Process基于局部高斯过程的半导体自动测试设备在线温度监测系统
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deleteKim, Jongwon; Baik, Seung Min; Yu, Dahm; Kim, Jaehyun; Ko, Young Myoung
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Investigating the Influence of Different Diverter Pipes on the Humidity for FOUP by Using Computational Fluid Dynamics利用计算流体动力学研究不同偏流管道对FOUP湿度的影响
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deleteChan, Yen-Hsin; Du, Jia-Sheng; Lin, Ming-Xian; Hsu, Chi-Hua
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Comprehensive Framework for Identifying and Visualizing Key Yield Factors in Semiconductor Manufacturing半导体制造中识别和可视化关键产量因素的综合性框架
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deleteDoh, Gyeunggeun; Seo, Jeongwoo; Oh, Sanghoun; Song, Minseok
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Evaluating the Impact of Emerging Contaminants on Membrane Performance in Ultrapure-Water Production for Semiconductor Manufacturing: A PRISMA-Directed Meta-Analysis评估新兴污染物对半导体制造中超纯水生产中膜性能影响：一项PRISMA指导的元分析
deleteIEEE Transactions on Semiconductor Manufacturing
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deleteTanveer, Hafiz Usama; Tanveer, Hasham; Fatima, Sheeza; Faisal Aslam, Rai; Tanveer, Hamza; Hashier Muneeb Farrukh, Muhammad
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