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International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, Eurosime

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Optimal design of piezoelectric MEMS for vibration monitoring system with nanoionics zero-energy memory elements

2023 24TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS, EUROSIME

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2023-04-17

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Shaporin, Alexey; Stoeckel, Chris; Melzer, Marcel; Schaller, Falk; Forke, Roman; Zimmermann, Sven; Kuhn, Harald

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