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Plasma Sources Science and Technology 封面图

Plasma Sources Science and Technology

IF3.3
论文数4936
被引数12318
期刊论文 4936
发表时间
Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF4 plasmas磁感应作用下电容耦合射频CF4等离子体中条纹的形成与破坏
delete2026-04-29
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deleteLi Wang; Aranka Derzsi; Peter Hartmann; Zoltán Donkó; Maximilian Ryppa; Constantin Neuroth; Florian Beckfeld; Wan Dong; Yuan-Hong Song; Julian Schulze
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Pulse breakdown of water: bubble model水的脉冲击穿:气泡模型
delete2026-04-27
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PREAI
deleteSergey M Korobeynikov; Denis V Vagin; Yulia Kuznetsova
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Study on the mechanism of optimal magnetic field strength for helicon discharge of different gases in MPS-LD不同气体在MPS-LD中回旋放电最优磁场强度的机理研究
delete2026-04-16
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PREAI
deleteYao Peng; Jintao Wu; Chaofeng Sang; Hao Wang; Changjiang Sun; Shuaishuai Gao; Chongyang Jin; Qi Wang; Dezhen Wang
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Atomic layer etching of sputter-deposited AlN thin films in radiofrequency Cl2–Ar plasmas射频Cl2–Ar等离子体中溅射沉积AlN薄膜的原子层刻蚀
delete2026-04-09
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deleteIurii Nesterenko; Joaquín Miranda-Mena; Benjamin Kalas; Dmytro Solonenko; Jon Farr; Steffen Harzenetter; Thang Duy Dao; Julian Schulze; Nikolai Andrianov
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