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Design, Test, and Microfabrication of MEMS and MOEMS

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Modeling and optimization of micro coils for telemetric transmission at frequencies up to 20 MHz
deleteDESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2
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delete1999-03-10
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deleteRehfuss, S; Marschner, C; Krieger, KL; Weser, M; Laur, R
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