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Journal of Micromechanics and Microengineering 封面图

Journal of Micromechanics and Microengineering

IF2.1
论文数170
被引数8671
期刊论文 170
发表时间
Etch rate enhancement of a DRIE process for fabrication of silicon micropillar arrays深反应离子刻蚀工艺中硅微柱阵列制备的刻蚀速率提升
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PREAI
deletePourhedayat Ganji, Alireza; Firoozabadi, Seyed Ahmadreza; Bouloorchi Tabalvandani, Mohammadjavad; Pourmand, Mohammad; Badieirostami, Majid
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ALD alumina (Al2O3)-enabled wafer-level anodic bonding of LTCC and SOI for MEMS integrationALD氧化铝(Al2O3)辅助的LTCC与SOI晶圆级阳极键合用于MEMS集成
delete2026-04-01
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PREAI
deleteYildiz, Fikret; Ozyigit, Dogu Kaan Bugra; Mahmood, Muhammad Rashid; Nakamura, Daisuke; Weidlinger, Gunther; Aumaier, Julian; Wernicke, Tobias
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Design and simulation of microbolometer-adapted micro-Pirani gauges for vacuum monitoring适用于真空监测的微测辐射热计适配型微皮兰规设计与仿真
delete2026-04-01
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PREAI
deleteXia, Hexin; Roy, Avisek; Gustavsen, Kim Robert; Bardalen, Eivind; Nguyen, Hoang-Vu; Ohlckers, Per; Aasmundtveit, Knut Eilif
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