Shahid Rauf - Publications, H-index & Citations

Shahid Rauf

applied materials inc

34H指数

281论文数

4.8K被引数

收录论文 32

发表时间

N2 capacitively coupled plasma-moment analysis of particle-in-cell modeling results N2电容耦合等离子体的粒子-网格模型结果矩分析

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2026-04-01

PREAI

Rauf, Shahid; Bera, Kallol; Nuwal, Nakul; Sahu, Rupali; Verma, Abhishek

Ar/CF4 capacitively coupled plasma generated using 40 MHz sinusoidal and 800 kHz rectangular waveform voltages 使用40 MHz正弦和800 kHz矩形波形电压产生的Ar/CF4电容耦合等离子体

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2024-12-03

PREAI

Rauf, Shahid; Ganta, Sathya; Shi, Xingyi; Bera, Kallol; Kenney, Jason

Study of synchronous RF pulsing in dual frequency capacitively coupled plasma 双频电容耦合等离子体中同步射频脉冲的研究

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2024-03-11

OAAI

Verma, Abhishek; Rauf, Shahid; Bera, Kallol; Sydorenko, D.; Khrabrov, A.; Kaganovich, Igor

A neural-network-based model of radio-frequency hollow cathode discharge characterized using particle-in-cell/Monte Carlo collision simulation 基于神经网络的射频空心阴极放电模型，使用单元内粒子/蒙特卡洛碰撞模拟来表征

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2024-02-29

PREAI

Bera, Kallol; Verma, Abhishek; Ganta, Sathya; Rauf, Shahid

Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge 双频电容耦合氧放电中离子能量分布函数的数值和实验研究

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-11-28

PREAI

Luo, Han; Kenney, Jason; Rauf, Shahid; Korolov, Ihor; Schulze, Julian

Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-10-20

OAAI

Xu, Liang; Sun, Haomin; Eremin, Denis; Ganta, Sathya; Kaganovich, Igor; Bera, Kallol; Rauf, Shahid; Wu, Xuemei

Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-06-06

OAAI

Donko, Zoltan; Hartmann, Peter; Korolov, Ihor; Schulenberg, David; Rohr, Stefan; Rauf, Shahid; Schulze, Julian

Particle-in-cell modeling of electron beam generated plasma 电子束产生的等离子体的单元内粒子建模

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-05-23

OAAI

Rauf, Shahid; Sydorenko, D.; Jubin, S.; Villafana, W.; Ethier, S.; Khrabrov, A.; Kaganovich, I

Plasma dynamics in a capacitively coupled discharge driven by a combination of a single high frequency and a tailored low frequency rectangular voltage waveform 由单个高频和定制的低频矩形电压波形组合驱动的电容耦合放电中的等离子体动力学

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-03-20

PREAI

Rauf, Shahid; Schroeder, Manuel; Korolov, Ihor; Kenney, Jason; Schulze, Julian

Effects of macroparticle weighting in axisymmetric particle-in-cell Monte Carlo collision simulations 大粒子加权在轴对称粒子内蒙特卡罗碰撞模拟中的影响

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2023-01-26

PREAI

Hara, Kentaro; Robertson, Timothy; Kenney, Jason; Rauf, Shahid

The 2021 release of the Quantemol database (QDB) of plasma chemistries and reactions

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2022-12-09

OAAI

Tennyson, Jonathan; Mohr, Sebastian; Hanicinec, M.; Dzarasova, Anna; Smith, Carrick; Waddington, Sarah; Liu, Bingqing; Alves, Luis L.; Bartschat, Klaus; Bogaerts, Annemie; Engelmann, Sebastian U.; Gans, Timo; Gibson, Andrew R.; Hamaguchi, Satoshi; Hamilton, Kathryn R.; Hill, Christian; O'Connell, Deborah; Rauf, Shahid; van 't Veer, Kevin; Zatsarinny, Oleg

Ion energy distribution functions in a dual-frequency low-pressure capacitively-coupled plasma: experiments and particle-in-cell simulation 双频低压电容耦合等离子体中的离子能量分布函数: 实验和单元内粒子模拟

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2021-07-29

PREAI

Wang, Jun-Chieh; Tian, Peng; Kenney, Jason; Rauf, Shahid; Korolov, Ihor; Schulze, Julian

On uniformity and non-local transport in low pressure capacitively coupled plasmas 关于低压电容耦合等离子体中的均匀性和非局部传输

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2020-09-17

PREAI

Rauf, Shahid

Radiofrequency phase resolved electron density measurements with the hairpin resonator probe

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2020-01-23

PREAI

Peterson, D. J.; Ford, K.; Brandon, J.; Shannon, S. C.; Koh, T.; Chua, T. C.; Bera, K.; Tian, W.; Rauf, S.; Kraus, P. A.

A model for etching of three-dimensional high aspect ratio silicon structures in pulsed inductively coupled plasmas 脉冲感应耦合等离子体中三维高深宽比硅结构刻蚀的模型

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2018-09-14

PREAI

Wang, J-C; Tian, W.; Rauf, S.; Sadighi, S.; Kenney, J.; Stout, P.; Vidyarthi, V. S.; Guo, J.; Zhou, T.; Delfin, K.; Lundy, N.; Pandey, S. C.; Guo, S.; Sandhu, G. S.

Model of a radio-frequency low electron temperature plasma source

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2018-07-05

PREAI

Rauf, Shahid; Dorf, Leonid; Collins, Kenneth

Modeling of low pressure plasma sources for microelectronics fabrication

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2017-09-22

PREAI

Agarwal, Ankur; Bera, Kallol; Kenney, Jason; Likhanskii, Alexandre; Rauf, Shahid

The 2017 Plasma Roadmap: Low temperature plasma science and technology

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2017-07-14

806

OAAI

Adamovich, I.; Baalrud, S. D.; Bogaerts, A.; Bruggeman, P. J.; Cappelli, M.; Colombo, V.; Czarnetzki, U.; Ebert, U.; Eden, J. G.; Favia, P.; Graves, D. B.; Hamaguchi, S.; Hieftje, G.; Hori, M.; Kaganovich, I. D.; Kortshagen, U.; Kushner, M. J.; Mason, N. J.; Mazouffre, S.; Thagard, S. Mededovic; Metelmann, H-R; Mizuno, A.; Moreau, E.; Murphy, A. B.; Niemira, B. A.; Oehrlein, G. S.; Petrovic, Z. Lj; Pitchford, L. C.; Pu, Y-K; Rauf, S.; Sakai, O.; Samukawa, S.; Starikovskaia, S.; Tennyson, J.; Terashima, K.; Turner, M. M.; van de Sanden, M. C. M.; Vardelle, A.

Etching with atomic precision by using low electron temperature plasma 使用低电子温度等离子体进行原子精度蚀刻

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2017-06-19

PREAI

Dorf, L.; Wang, J-C; Rauf, S.; Monroy, G. A.; Zhang, Y.; Agarwal, A.; Kenney, J.; Ramaswamy, K.; Collins, K.

Three-dimensional model of electron beam generated plasma

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2017-05-05

PREAI

Rauf, Shahid; Balakrishna, Ajit; Agarwal, Ankur; Dorf, Leonid; Collins, Kenneth; Boris, David R.; Walton, Scott G.

研究方向