Jaakko Saarilahti - Publications, H-index & Citations

Jaakko Saarilahti

universite de lille

12H指数

75论文数

974被引数

收录论文 6

发表时间

Real-time frequency matching circuit for a high sensitivity cMUT-based gas flow sensor

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2025-03-01

OAAI

Pernu, Tapio; Saarilahti, Jaakko; Sillanpaa, Teuvo

Properties of nanocrystalline silicon probed by optomechanics

NANOPHOTONICS

IF6.6

2020-10-15

OAAI

Navarro-Urrios, Daniel; Colombano, Martin F.; Maire, Jeremie; Chavez-Angel, Emigdio; Arregui, Guillermo; Capuj, Nestor E.; Devos, Arnaud; Griot, Amadeu; Bellieres, Laurent; Martinez, Alejandro; Grigoras, Kestutis; Hakkinen, Teija; Saarilahti, Jaakko; Makkonen, Tapani; Sotomayor-Torres, Clivia M.; Ahopelto, Jouni

A 3D micromechanical compass 三维微机械罗盘

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2008-04-01

PREAI

Kyynarainen, Jukka; Saarilahti, Jaakko; Kattelus, Hannu; Karkkainen, Anu; Meinander, Tor; Oja, Aarne; Pekko, Panu; Seppa, Heikki; Suhonen, Mika; Kuisma, Heikki; Ruotsalainen, Sami; Tilli, Markku

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2000-08-01

143

PREAI

Torkkeli, A; Rusanen, O; Saarilahti, J; Seppä, H; Sipola, H; Hietanen, J

Diffusion barrier performance of thin Cr films in the Cu/Cr/Si structure

MATERIALS RESEARCH BULLETIN

IF5.7

1998-09-01

PREAI