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Modification of Porous Ultralow-k Film by Vacuum UltravioletEmission Zotovich, Alexey, I; Zyryanov, Sergey M.; Lopaev, Dmitry, V; Rezvanov, Askar A.; Attallah, Ahmed G.; Liedke, Maciej O.; Butterling, Maik; Bogdanova, Maria A.; Vishnevskiy, Alexey S.; Seregin, Dmitry S.; Vorotyntsev, Dmitry A.; Palov, Alexander P.; Hirschmann, Eric; Wagner, Andreas; Naumov, Sergej; Vorotilov, Konstantin A.; Rakhimova, Tatyana, V; Rakhimov, Alexander T.; Baklanov, Mikhail R. 分享 收藏
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Effect of H atoms and UV wideband radiation on cured low-k OSG films Lopaev, D., V; Zotovich, A., I; Zyryanov, S. M.; Bogdanova, M. A.; Rakhimova, T., V; Mankelevich, Y. A.; Novikova, N. N.; Seregin, D. S.; Vishnevskiy, A. S.; Vorotilov, K. A.; Shi, Xiaoping; Baklanov, M. R. 分享 收藏
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Effects of Methyl Terminal and Carbon Bridging Groups Ratio on Critical Properties of Porous Organosilicate Glass Films Vishnevskiy, Alexey S.; Naumov, Sergej; Seregin, Dmitry S.; Wu, Yu-Hsuan; Chuang, Wei-Tsung; Rasadujjaman, Md; Zhang, Jing; Leu, Jihperng; Vorotilov, Konstantin A.; Baklanov, Mikhail R. 分享 收藏
Superconductivity in a disordered metal with Coulomb interactions Postolova, Svetlana, V; Mironov, Alexey Yu; Barrena, Victor; Benito-Llorens, Jose; Gabriel Rodrigo, Jose; Suderow, Hermann; Baklanov, Mikhail R.; Baturina, Tatyana, I; Vinokur, Valerii M. 分享 收藏
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VUV radiation flux from argon DC magnetron plasma Pal, A. F.; Ryabinkin, A. N.; Serov, A. O.; Lopaev, D., V; Mankelevich, Yu A.; Rakhimov, A. T.; Rakhimova, T., V; Baklanov, M. R. 分享 收藏
O2 plasma treated biosensor for enhancing detection sensitivity of sulfadiazine in a high-K HfO2 coated silicon nanowire array Zhang, Nan; Zhang, Zhaohao; Zhang, Qingzhu; Wei, Qianhui; Zhang, Jing; Tang, Siqi; Lv, Chunguang; Wang, Yanrong; Zhao, Hongbin; Wei, Feng; Yan, Jiang; Baklanov, Mikhail; Yin, Huaxiang; Wang, Wenwu; Tu, Hailing 分享 收藏
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Effect of thickness scaling on the permeability and thermal stability of Ta(N) diffusion barrier Xu, Haoyu; Hu, Zheng-Jun; Qu, Xin-Ping; Wan, Hao; Yan, Shen-Suo; Li, Ming; Chen, Shou-Mian; Zhao, Yu-Hang; Zhang, Jing; Baklanov, Mikhail R. 分享 收藏
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Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models Baklanov, M. R.; Jousseaume, V.; Rakhimova, T. V.; Lopaev, D. V.; Mankelevich, Yu. A.; Afanas'ev, V. V.; Shohet, J. L.; King, S. W.; Ryan, E. T. 分享 收藏
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