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Yuliang Long

Chinese Academy of Sciences

3H指数
15论文数
19被引数
收录论文 5
发表时间
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A White Light Spectral Interferometric Demodulation Method Based on Frequency Domain Solving and Model Matching一种基于频域求解和模型匹配的白光光谱干涉解调方法
errIEEE PHOTONICS JOURNAL
IF2.4
err2025-12-01
err0
PREAI
errYang, Yanfang; Cheng, Xiaolong; Long, Yuliang; Liu, Wei; Gong, Xinxiang; Jiang, Jinfeng; Tang, Yan
err分享
err收藏
Diffraction order enhanced multi-diffraction order utilization overlay error metrology method衍射级次增强的多衍射级次利用叠加误差测量方法
errMEASUREMENT SCIENCE AND TECHNOLOGY
IF3.4
err2025-04-24
err0
PREAI
errLiu, Shaoyu; Tang, Yan; Cheng, Xiaolong; Long, Yuliang; Jiang, Jinfeng; He, Yu; Zhao, Lixin
err分享
err收藏
Using Higher Diffraction Orders to Improve the Accuracy and Robustness of Overlay Measurements
errMICROMACHINES
IF3
err2025-03-19
err0
errOAAI
errLiu, Shaoyu; Tang, Yan; Cheng, Xiaolong; Long, Yuliang; Jiang, Jinfeng; He, Yu; Zhao, Lixin
err分享
err收藏
Small-area marks realize nanoscale lithography alignment by a spatial and frequency domain fusion neural network
errOPTICS LETTERS
IF3.3
err2025-02-03
err0
PREAI
errLong, Yuliang; Tang, Yan; Jiang, Jinfeng; Gong, Xinxiang; Yang, Yanfang; Liu, Wei; Zhao, Lixin; Cheng, Xiaolong
err分享
err收藏
Large-range lithography nano-alignment without phase unwrapping by a dual-frequency moiré fringe heterodyne
errOPTICS LETTERS
IF3.3
err2023-10-16
err2
PREAI
errCheng, Xiaolong; Yang, Zimo; Long, Yuliang; Xiang, Qianjin; Feng, Jinhua; Yang, Yong; Tang, Yan
err分享
err收藏

研究方向

暂时未获取到该数据
合作学者
合作期刊
刘玮 封面图
刘玮 (Wei Liu)
H 指数: 109 · 论文数: 1.6K
杨志勇 封面图
杨志勇 (Yong Yang)
H 指数: 39 · 论文数: 234
X
Xiaolong Cheng
H 指数: 26 · 论文数: 144
Y
Yan Tang
H 指数: 23 · 论文数: 147
Y
Yan Tang
H 指数: 22 · 论文数: 138
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