Hideki Hirano - Publications, H-index & Citations

Hideki Hirano

tohoku university

18H指数

76论文数

897被引数

收录论文 11

发表时间

Event-Driven Tactile Sensing System Including 100 CMOS-MEMS Integrated 3-Axis Force Sensors Based on Asynchronous Serial Bus Communication

IEEE SENSORS JOURNAL

IF4.5

2020-09-01

PREAI

Shao, Chenzhong; Hirano, Hideki; Miyaguchi, Hiroshi; Nomoto, Munetaka; Muroyama, Masanori; Tanaka, Shuji

Low-temperature hermetic thermo-compression bonding using electroplated copper sealing frame planarized by fly-cutting for wafer-level MEMS packaging

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2018-08-01

PREAI

Al Farisi, Muhammad Salman; Hirano, Hideki; Tanaka, Shuji

Bonding-BasedWafer-Level Vacuum Packaging Using Atomic Hydrogen Pre-Treated Cu Bonding Frames

MICROMACHINES

IF3

2018-04-13

OAAI

Tanaka, Koki; Hirano, Hideki; Kumano, Masafumi; Froemel, Joerg; Tanaka, Shuji

Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2018-04-01

OAAI

Hata, Yoshiyuki; Suzuki, Yukio; Muroyama, Masanori; Nakayama, Takahiro; Nonomura, Yutaka; Chand, Rakesh; Hirano, Hideki; Omura, Yoshiteru; Fujiyoshi, Motohiro; Tanaka, Shuji

Wafer-level vacuum sealing using AgAg thermocompression bonding after fly-cut planarization

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2017-07-01

OAAI

Liu, Cong; Hirano, Hideki; Froemel, Joerg; Tanaka, Shuji

Investigation of Surface Pre-Treatment Methods for Wafer-Level Cu-Cu Thermo-Compression Bonding

MICROMACHINES

IF3

2016-12-15

OAAI

Tanaka, Koki; Wang, Wei-Shan; Baum, Mario; Froemel, Joerg; Hirano, Hideki; Tanaka, Shuji; Wiemer, Maik; Otto, Thomas

Wafer-level Vacuum Packaging by Thermocompression Bonding using Silver after Fly-cut Planarization

SEMICONDUCTOR WAFER BONDING: SCIENCE, TECHNOLOGY AND APPLICATIONS 14

IF0

2016-08-24

PREAI

Liu, C.; Hirano, H.; Froemel, J.; Tanaka, S.

Moving Tunable Filters Forward

IEEE MICROWAVE MAGAZINE

IF2.6

2015-08-01

PREAI

Hashimoto, Ken-ya; Kimura, Tetsuya; Matsumura, Takeshi; Hirano, Hideki; Kadota, Michio; Esashi, Masayoshi; Tanaka, Shuji

Wideband tunable Love wave filter using electrostatically actuated MEMS variable capacitors integrated on lithium niobate 使用集成在铌酸锂上的静电驱动MEMS可变电容器的宽带可调谐Love波滤波器

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2012-12-01

PREAI

Yasue, Toshiki; Komatsu, Tomoya; Nakamura, Nobuyuki; Hashimoto, Ken-ya; Hirano, Hideki; Esashi, Masayoshi; Tanaka, Shuji

Magneto-photoluminescence from single-quantum structures of diluted magnetic semiconductor fabricated by e-beam lithography

JOURNAL OF LUMINESCENCE

IF3.6

2007-01-01

PREAI

Murayama, A.; Hirano, H.; Hyomi, K.; Sakuma, M.; Souma, I.; Oka, Y.

A novel fabrication technique and new conjugated polymers for multilayer polymer light-emitting diodes

POLYMERS FOR ADVANCED TECHNOLOGIES

IF3.4

1997-07-01

PREAI

Murata, H; Ukishima, S; Hirano, H; Yamanaka, T

研究方向