Frank Scholze - Publications, H-index & Citations

Frank Scholze

Leibniz Association

39H指数

332论文数

5.5K被引数

收录论文 27

发表时间

Investigation and validation of pulsed ion extraction in reactive ion beam etching for ultra-precision surface processing 脉冲离子提取在反应离子束刻蚀中的研究及验证，用于超精密表面加工

Applied Surface Science

IF6.9

2026-07-01

PREAI

Birtel, Peter; Scholze, Frank; Frost, Frank

Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm

OPTICS EXPRESS

IF3.3

2021-11-24

OAAI

Saadeh, Qais; Naujok, Philipp; Philipsen, Vicky; Hoenicke, Philipp; Laubis, Christian; Buchholz, Christian; Andrle, Anna; Stadelhoff, Christian; Mentzel, Heiko; Schoenstedt, Anja; Soltwisch, Victor; Scholze, Frank

Uncertainties in the reconstruction of nanostructures in EUV scatterometry and grazing incidence small-angle X-ray scattering

OPTICS EXPRESS

IF3.3

2021-10-15

OAAI

Herrero, Analia Fernandez; Pflueger, Mika; Puls, Jana; Scholze, Frank; Soltwisch, Victor

Interface morphology of Mo/Si multilayer systems with varying Mo layer thickness studied by EUV diffuse scattering

OPTICS EXPRESS

IF3.3

2017-06-22

OAAI

Haase, Anton; Soltwisch, Victor; Braun, Stefan; Laubis, Christian; Scholze, Frank

PHYSICAL REVIEW B

IF3.7

2016-07-13

OAAI

Soltwisch, V.; Haase, A.; Wernecke, J.; Probst, J.; Schoengen, M.; Burger, S.; Krumrey, M.; Scholze, F.

Extended asymmetric-cut multilayer X-ray gratings

OPTICS EXPRESS

IF3.3

2015-06-01

OAAI

Prasciolu, Mauro; Haase, Anton; Scholze, Frank; Chapman, Henry N.; Bajt, Sasa

Robust UV/VUV/EUV PureB Photodiode Detector Technology With High CMOS Compatibility

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

IF5.1

2014-11-01

PREAI

Nanver, Lis K.; Qi, Lin; Mohammadi, Vahid; Mok, K. R. M.; de Boer, Wiebe B.; Golshani, Negin; Sammak, Amir; Scholtes, Thomas L. M.; Gottwald, Alexander; Kroth, Udo; Scholze, Frank

New reference and test materials for the characterization of energy dispersive X-ray spectrometers at scanning electron microscopes

ANALYTICAL AND BIOANALYTICAL CHEMISTRY

IF3.8

2014-10-19

PREAI

Rackwitz, Vanessa; Krumrey, Michael; Laubis, Christian; Scholze, Frank; Hodoroaba, Vasile-Dan

Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry

OPTICS LETTERS

IF3.3

2012-12-13

PREAI

Henn, Mark-Alexander; Heidenreich, Sebastian; Gross, Hermann; Rathsfeld, Andreas; Scholze, Frank; Baer, Markus

A maximum likelihood approach to the inverse problem of scatterometry

OPTICS EXPRESS

IF3.3

2012-05-23

OAAI

Henn, Mark-Alexander; Gross, Hermann; Scholze, Frank; Wurm, Matthias; Elster, Clemens; Baer, Markus

Electrical and Optical Performance Investigation of Si-Based Ultrashallow-Junction p+-n VUV/EUV Photodiodes

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

IF5.9

2012-05-01

PREAI

Shi, Lei; Nihtianov, Stoyan; Xia, Sha; Nanver, Lis K.; Gottwald, Alexander; Scholze, Frank

An EUV beamsplitter based on conical grazing incidence diffraction

OPTICS EXPRESS

IF3.3

2012-01-12

OAAI

Braig, C.; Fritzsch, L.; Kaesebier, T.; Kley, E. -B.; Laubis, C.; Liu, Y.; Scholze, F.; Tuennermann, A.

Nitriding of austenitic stainless steel using pulsed low energy Ion implantation

SURFACE & COATINGS TECHNOLOGY

IF6.1

2011-07-01

PREAI

Manova, D.; Scholze, F.; Maendl, S.; Neumann, H.

Nitriding of austenitic stainless steel by pulsed low energy ion implantation

SURFACE & COATINGS TECHNOLOGY

IF6.1

2010-06-01

PREAI

Manova, D.; Gerlach, J. W.; Scholze, F.; Maendl, S.; Neumann, H.

Pre-flight calibration of LYRA, the solar VUV radiometer on board PROBA2

ASTRONOMY & ASTROPHYSICS

IF5.8

2009-11-04

OAAI

BenMoussa, A.; Dammasch, I. E.; Hochedez, J. -F.; Schuehle, U.; Koller, S.; Stockman, Y.; Scholze, F.; Richter, M.; Kroth, U.; Laubis, C.; Dominique, M.; Kretzschmar, M.; Mekaoui, S.; Gissot, S.; Theissen, A.; Giordanengo, B.; Bolsee, D.; Hermans, C.; Gillotay, D.; Defise, J. -M.; Schmutz, W.

Detector calibration and measurement of fundamental parameters for X-ray spectrometry

MICROCHIMICA ACTA

IF5.3

2006-05-04

PREAI

Scholze, Frank; Beckhoff, Burkhard; Kolbe, Michael; Krumrey, Michael; Mueller, Matthias; Ulm, Gerhard

Plasma and ion beam characterization by non-conventional methods 通过非常规方法表征等离子体和离子束

SURFACE & COATINGS TECHNOLOGY

IF6.1

2005-10-01

PREAI

Kersten, H; Wiese, R; Hannemann, M; Kapitov, A; Scholze, F; Neumann, H; Hippler, R