E. G. Shustin - Publications, H-index & Citations | 科言猫

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E. G. Shustin

russian academy of sciences

9H指数

65论文数

214被引数

收录论文 6

发表时间

Simulation of sputtering from an isolated conductor surrounded by a dielectric during plasma etching

IF3.9

2019-07-01

6

PREAI

Tarakanov, V. P.; Shustin, E. G.; Ronald, K.

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Computer simulation of the sheath and the adjacent plasma in the presence of a plasma source

IF3.9

2017-01-01

7

OAAI

Shustin, E. G.; Tarakanov, V. P.; Ronald, K.

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Charging effects of plasma impact on microconductor structures on an insulator in plasma processing technologies (vol 113, pg 59, 2015)

IF3.9

2015-09-01

0

PREAI

Tarakanov, V. P.; Shustin, E. G.

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Charging effects of plasma impact on microconductor structures on an insulator in plasma processing technologies 等离子体处理技术中等离子体冲击对绝缘体上微导体结构的充电效应

IF3.9

2015-03-01

7

PREAI

Tarakanov, V. P.; Shustin, E. G.

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Control of the energy of ion flow affecting electrically insulated surface in plasma processing reactor based on a beam plasma discharge 基于束等离子体放电的等离子体处理反应器中影响电绝缘表面的离子流能量的控制

IF3.9

2011-01-01

13

PREAI

Shustin, E. G.; Isaev, N. V.; Klykov, I. L.; Peskov, V. V.

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Beam plasma discharge at low magnetic field as plasma source for plasma processing reactor 低磁场束等离子体放电作为等离子体处理反应器的等离子体源

IF3.9

2009-07-01

24

PREAI

Shustin, E. G.; Isaev, N. V.; Temiryazeva, M. P.; Fedorov, Yu. V.

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