В. П. Тараканов - Publications, H-index & Citations | 科言猫

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В. П. Тараканов

russian academy of sciences

20H指数

302论文数

2.0K被引数

收录论文 5

发表时间

Influence of external parameters on RF inductive discharge plasma characteristics 外部参数对射频感应放电等离子体特性的影响

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2021-11-26

3

PREAI

Kralkina, Elena; Nekludova, Polina; Nikonov, Aleksander; Vavilin, Konstantin; Zadiriev, Ilya; Tarakanov, Vladimir

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Simulation of sputtering from an isolated conductor surrounded by a dielectric during plasma etching

IF3.9

2019-07-01

6

PREAI

Tarakanov, V. P.; Shustin, E. G.; Ronald, K.

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Computer simulation of the sheath and the adjacent plasma in the presence of a plasma source

IF3.9

2017-01-01

7

OAAI

Shustin, E. G.; Tarakanov, V. P.; Ronald, K.

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Charging effects of plasma impact on microconductor structures on an insulator in plasma processing technologies (vol 113, pg 59, 2015)

IF3.9

2015-09-01

0

PREAI

Tarakanov, V. P.; Shustin, E. G.

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Charging effects of plasma impact on microconductor structures on an insulator in plasma processing technologies 等离子体处理技术中等离子体冲击对绝缘体上微导体结构的充电效应

IF3.9

2015-03-01

7

PREAI

Tarakanov, V. P.; Shustin, E. G.

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