Oili Ylivaara - Publications, H-index & Citations

Oili Ylivaara

vtt technical research center finland

16H指数

90论文数

904被引数

收录论文 6

发表时间

Saturation profile measurement of atomic layer deposited film by X-ray microanalysis on lateral high-aspect-ratio structure

APPLIED SURFACE SCIENCE ADVANCES

IF8.7

2021-09-01

OAAI

Haimi, Eero; Ylivaara, Oili M. E.; Yim, Jihong; Puurunen, Riikka L.

Intercalation of Lithium Ions from Gaseous Precursors into β-MnO2 Thin Films Deposited by Atomic Layer Deposition

JOURNAL OF PHYSICAL CHEMISTRY C

IF3.2

2019-06-03

OAAI

Nieminen, Heta-Elisa; Miikkulainen, Ville; Settipani, Daniel; Simonelli, Laura; Hoenicke, Philipp; Zech, Claudia; Kayser, Yves; Beckhoff, Burkhard; Honkanen, Ari-Pekka; Heikkila, Mikko J.; Mizohata, Kenichiro; Meinander, Kristoffer; Ylivaara, Oili M. E.; Huotari, Simo; Ritala, Mikko

Microelectrode Array With Transparent ALD TiN Electrodes

FRONTIERS IN NEUROSCIENCE

IF3.2

2019-03-22

OAAI

Ryynanen, Tomi; Pelkonen, Anssi; Grigoras, Kestutis; Ylivaara, Oili M. E.; Hyvarinen, Tanja; Ahopelto, Jouni; Prunnila, Mika; Narkilahti, Susanna; Lekkala, Jukka

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide

NANOSCALE RESEARCH LETTERS

IF4.1

2019-02-12

OAAI

Zhu, Zhen; Sippola, Perttu; Ylivaara, Oili M. E.; Modanese, Chiara; Di Sabatino, Marisa; Mizohata, Kenichiro; Merdes, Saoussen; Lipsanen, Harri; Savin, Hele

Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate

WEAR

IF6.1

2015-11-01

OAAI

Lyytinen, Jussi; Liu, Xuwen; Ylivaara, Oili M. E.; Sintonen, Sakari; Iyer, Ajai; Ali, Saima; Julin, Jaakko; Lipsanen, Harri; Sajavaara, Timo; Puurunen, Riikka L.; Koskinen, Jari

Silicon full wafer bonding with atomic layer deposited titanium dioxide and aluminum oxide intermediate films

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2012-12-01

PREAI

Puurunen, R. L.; Suni, T.; Ylivaara, O. M. E.; Kondo, H.; Ammar, M.; Ishida, T.; Fujita, H.; Bosseboeuf, A.; Zaima, S.; Kattelus, H.

研究方向