C. Beitia - Publications, H-index & Citations

C. Beitia

communaute universite grenoble alpes

11H指数

58论文数

862被引数

收录论文 7

发表时间

Metrology for the next generation of semiconductor devices (vol 1, pg 532, 2018)

NATURE ELECTRONICS

IF40.9

2018-11-09

OAAI

Orji, N. G.; Badaroglu, M.; Barnes, B. M.; Beitia, C.; Bunday, B. D.; Celano, U.; Kline, R. J.; Neisser, M.; Obeng, Y.; Vladar, A. E.

Metrology for the next generation of semiconductor devices 下一代半导体器件的计量

NATURE ELECTRONICS

IF40.9

2018-10-12

329

OAAI

Orji, N. G.; Badaroglu, M.; Barnes, B. M.; Beitia, C.; Bunday, B. D.; Celano, U.; Kline, R. J.; Neisser, M.; Obeng, Y.; Vladar, A. E.

Benefits of XPS nanocharacterization for process development and industrial control of thin SiGe channel layers in advanced CMOS technologies

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

IF4.6

2017-11-01

PREAI

Fauquier, L.; Pelissier, B.; Jalabert, D.; Pierre, F.; Hartmann, J. M.; Roze, F.; Doloy, D.; Le Cunff, D.; Beitia, C.; Baron, T.

Spectroscopic investigations of borosilicate glass and its application as a dopant source for shallow junctions

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

IF3.3

2000-01-01

PREAI

Nolan, M; Perova, TS; Moore, RA; Beitia, CE; McGilp, JF; Gamble, HS

Substrate-induced multipolar resonances in supported free-electron metal spheres

PHYSICAL REVIEW B

IF3.7

1999-08-15

PREAI

Beitia, C; Borensztein, Y; Lazzari, R; Nieto, J; Barrera, RG

Adsorption kinetics of H on Si(111)7x7 by means of surface differential reflectivity

PHYSICAL REVIEW B

IF3.7

1997-08-15

PREAI

Beitia, C; Preyss, W; DelSole, R; Borensztein, Y

Optical spectroscopy study of hydrogenation of the Si(111)-7x7 surface

APPLIED SURFACE SCIENCE

IF6.9

1996-09-01

PREAI

Roy, M; Beitia, C; Borensztein, Y; Shkrebtii, A; Noguez, C; DelSole, R

研究方向