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收藏Fabrication of silicon-on-SiO2/diamondlike-carbon dual insulator using ion cutting and mitigation of self-heating effects
Di, ZF; Chu, PK; Zhu, M; Fu, RKY; Luo, SH; Shao, L; Nastasi, M; Chen, P; Alford, TL; Mayer, JW; Zhang, M; Liu, WL; Song, ZT; Lin, CL
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收藏H-induced platelet and crack formation in hydrogenated epitaxial Si/Si0.98B0.02/Si structures -: art. no. 021901
Shao, L; Lin, Y; Swadener, JG; Lee, JK; Jia, QX; Wang, YQ; Nastasi, M; Thompson, PE; Theodore, ND; Alford, TL; Mayer, JW; Chen, P; Lau, SS
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收藏Strain-facilitated process for the lift-off of a Si layer of less than 20 nm thickness
Shao, L; Lin, Y; Swadener, JG; Lee, JK; Jia, QX; Wang, YQ; Nastasi, M; Thompson, PE; Theodore, ND; Alford, TL; Mayer, JW; Chen, P; Lau, SS
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收藏Microwave-cut silicon layer transfer
Thompson, DC; Alford, TL; Mayer, JW; Hochbauer, T; Nastasi, M; Lau, SS; Theodore, ND; Henttinen, K; Suni, I; Chu, PK
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收藏Silicon layer transfer using plasma hydrogenation
Chen, P; Lau, SS; Chu, PK; Henttinen, K; Suni, T; Suni, I; Theodore, ND; Alford, TL; Mayer, JW; Shao, L; Nastasi, M
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收藏Plasma hydrogenation of strained Si/SiGe/Si heterostructure for layer transfer without ion implantation
Shao, L; Lin, Y; Lee, JK; Jia, QX; Wang, YQ; Nastasi, M; Thompson, PE; Theodore, ND; Chu, PK; Alford, TL; Mayer, JW; Chen, P; Lau, SS
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收藏Investigation of plasma hydrogenation and trapping mechanism for layer transfer -: art. no. 031904
Chen, P; Chu, PK; Höchbauer, T; Lee, JK; Nastasi, M; Buca, D; Mantl, S; Loo, R; Caymax, M; Alford, T; Mayer, JW; Theodore, ND; Cai, M; Schmidt, B; Lau, SS
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收藏Plasma hydrogenation of strain-relaxed SiGe/Si heterostructure for layer transfer
Chen, P; Chu, PK; Höchbauer, T; Nastasi, M; Buca, D; Mantl, S; Theodore, ND; Alford, TL; Mayer, JW; Loo, R; Caymax, M; Cai, M; Lau, SS
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