P. Ranson - Publications, H-index & Citations

P. Ranson

universite de orleans

29H指数

186论文数

2.2K被引数

收录论文 11

发表时间

Parametric study of STiGer etching process in order to reduce extended formation of scalloping defects on the sidewalls of silicon submicron trenches

VACUUM

IF3.9

2016-11-01

PREAI

Kafrouni, W.; Tillocher, T.; Ladroue, J.; Lefaucheux, P.; Boufnichel, M.; Ranson, P.; Dussart, R.

Neutral species in inductively coupled SF6/SiCl4 plasmas

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2009-05-15

PREAI

Duluard, C. Y.; Ranson, P.; Pichon, L. E.; Oubensaid, E. H.; Pereira, J.; Lefaucheux, P.; Puech, M.; Dussart, R.

In situ x-ray photoelectron spectroscopy analysis of SiOxFy passivation layer obtained in a SF6/O2 cryoetching process

APPLIED PHYSICS LETTERS

IF3.6

2009-02-18

PREAI

Pereira, J.; Pichon, L. E.; Dussart, R.; Cardinaud, C.; Duluard, C. Y.; Oubensaid, E. H.; Lefaucheux, P.; Boufnichel, M.; Ranson, P.

SO2 passivating chemistry for silicon cryogenic deep etching

PLASMA SOURCES SCIENCE & TECHNOLOGY

IF3.3

2008-08-26

PREAI

Duluard, C. Y.; Dussart, R.; Tillocher, T.; Pichon, L. E.; Lefaucheux, P.; Puech, M.; Ranson, P.

Properties of deep etched trenches in silicon: Role of the angular dependence of the sputtering yield and the etched species redeposition 硅中深蚀刻沟槽的特性: 溅射产率和蚀刻物种再沉积的角度依赖性的作用

APPLIED SURFACE SCIENCE

IF6.9

2008-03-01

PREAI

Marcos, G.; Rhallabi, A.; Ranson, P.

Two cryogenic processes involving SF6, O2, and SiF4 for silicon deep etching

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

IF3.3

2008-01-01

PREAI

Tillocher, T.; Dussart, R.; Overzet, L. J.; Mellhaoui, X.; Lefaucheux, P.; Boufnichel, M.; Ranson, P.

Silicon columnar microstructures induced by an SF6/O2 plasma

JOURNAL OF PHYSICS D-APPLIED PHYSICS

IF3.2

2005-09-02

PREAI

Dussart, R; Mellhaoui, X; Tillocher, T; Lefaucheux, P; Volatier, M; Socquet-Clerc, C; Brault, P; Ranson, P

A combined X-ray diffraction and Raman scattering study of the phase transitions in Sr1-xCaxTiO3 (x=0.04, 0.06, and 0.12)

JOURNAL OF SOLID STATE CHEMISTRY

IF3.5

2005-09-01

PREAI

Mishra, SK; Ranjan, R; Pandey, D; Ranson, P; Ouillon, R; Pinan-Lucarre, JP; Pruzan, P

Low-temperature Raman spectra of nitromethane single crystals.: Lattice dynamics and Davydov splittings

JOURNAL OF CHEMICAL PHYSICS

IF3.1

2002-03-15

PREAI

Ouillon, R; Pinan-Lucarré, JP; Ranson, P; Baranovic, G

A Raman scattering study of the antiferroelectric phase transition in (Sr0.70Ca0.30)TiO3 -: art. no. 092302

PHYSICAL REVIEW B

IF3.7

2001-08-10

PREAI

Mishra, SK; Ranjan, R; Pandey, D; Ouillon, R; Pinan-Lucarre, JP; Ranson, P; Pruzan, P

High resolution Raman study of phonon and vibron bandwidths in isotopically pure and natural benzene crystal

JOURNAL OF CHEMICAL PHYSICS

IF3.1

1998-10-01

PREAI

Pinan, JP; Ouillon, R; Ranson, P; Becucci, M; Califano, S

研究方向