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Yanpeng Hu

university of science and technology beijing

8H指数
27论文数
139被引数
收录论文 8
发表时间
Process and characteristics of cobalt films deposited by thermal atomic layer deposition and silicide film formed热原子层沉积沉积的钴薄膜及其形成的硅化物薄膜的工艺与特性
errVacuum
IF3.9
err2025-07-08
err0
PREAI
errShuai Yang; Jianfeng Gao; Jinjuan Xiang; Weibing Liu; Yanpeng Hu; Zhenxing Wang; Meng Liang; Lin Li; Qing Liu; Guilei Wang; Junfeng Li; Chao Zhao; Jun Luo
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The Study of Reactive Ion Etching of Heavily Doped Polysilicon Based on HBr/O2/He Plasmas for Thermopile Devices基于HBr/O2/He等离子体的重掺杂多晶硅反应离子刻蚀热电堆器件的研究
err2020-09-25
err7
errOAAI
errZhou, Na; Li, Junjie; Mao, Haiyang; Liu, Hao; Liu, Jinbiao; Gao, Jianfeng; Xiang, Jinjuan; Hu, Yanpeng; Shi, Meng; Ju, Jiaxin; Lei, Yuxiao; Yang, Tao; Li, Junfeng; Wang, Wenwu
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