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J

Jinfeng Jiang

Chinese Academy of Sciences

2H指数
17论文数
10被引数
收录论文 5
发表时间
Using Higher Diffraction Orders to Improve the Accuracy and Robustness of Overlay Measurements
err2025-03-19
err0
errOAAI
errLiu, Shaoyu; Tang, Yan; Cheng, Xiaolong; Long, Yuliang; Jiang, Jinfeng; He, Yu; Zhao, Lixin
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Small-area marks realize nanoscale lithography alignment by a spatial and frequency domain fusion neural network
err2025-02-03
err0
PREAI
errLong, Yuliang; Tang, Yan; Jiang, Jinfeng; Gong, Xinxiang; Yang, Yanfang; Liu, Wei; Zhao, Lixin; Cheng, Xiaolong
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