未登录Substrate-decoupled, bulk-acoustic wave gyroscopes: Design and evaluation of next-generation environmentally robust devices
Serrano, Diego E.; Zaman, Mohammad F.; Rahafrooz, Amir; Hrudey, Peter; Lipka, Ron; Younkin, Duane; Nagpal, Shin; Jafri, Ijaz; Ayazi, Farrokh
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