Jyrki Kiihamäki - Publications, H-index & Citations

Jyrki Kiihamäki

vtt technical research center finland

18H指数

65论文数

1.2K被引数

收录论文 7

发表时间

Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition 通过原子层沉积生长的粗糙纳米级薄膜减少微机电系统中的静摩擦

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2012-12-01

PREAI

Puurunen, R. L.; Haara, A.; Saloniemi, H.; Dekker, J.; Kainlauri, M.; Pohjonen, H.; Suni, T.; Kiihamaki, J.; Santala, E.; Leskela, M.; Kattelus, H.

Correlation Between Film Properties and Anhydrous HF Vapor Etching Behavior of Silicon Oxide Deposited by CVD Methods

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

IF3.3

2011-01-01

PREAI

Ritala, H.; Kiihamaki, J.; Puukilainen, E.

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2006-08-01

OAAI

Kaajakari, Ville; Kiihamaki, Jyrki; Oja, Aarne; Pietikainen, Sami; Kokkala, Ville; Kuisma, Heikki

Long-term stability of single-crystal silicon microresonators

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2004-09-01

PREAI

Koskenvuori, M; Mattila, T; Häärä, A; Kiihamäki, J; Tittonen, I; Oja, A; Seppä, H

A 12 MHz micromechanical bulk acoustic mode oscillator

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2002-09-01

131

PREAI

Mattila, T; Kiihamäki, J; Lamminmäki, T; Jaakkola, O; Rantakari, P; Oja, A; Seppä, H; Kattelus, H; Tittonen, I

14 MHz micromechanical oscillator 14 mhz微机械振荡器

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2002-04-01

PREAI

Mattila, T; Jaakkola, O; Kiihamäki, J; Karttunen, J; Lamminmäki, T; Rantakari, P; Oja, A; Seppä, H; Kattelus, H; Tittonen, I

Depth and profile control in plasma etched MEMS structures 等离子蚀刻MEMS结构的深度和轮廓控制

SENSORS AND ACTUATORS A-PHYSICAL

IF4.9

2000-05-01

PREAI

Kiihamäki, J; Kattelus, H; Karttunen, J; Franssila, S

研究方向