Liang-Chia Chen - Publications, H-index & Citations

Liang-Chia Chen

national taiwan university

45H指数

339论文数

1.1W被引数

收录论文 43

发表时间

A physical-model-based multi-level deconvolution network to achieve nanoscale measurement accuracy for optical critical dimension metrology 基于物理模型的多层次去卷积网络，以实现光学关键尺寸测量中的纳米级测量精度

Measurement Science and Technology

IF3.4

2026-03-02

OAAI

Wei-Yun Lee; Yu-Ting Cheng; Ming-Jie Liu; Yu-Tang Huang; Liang-Chia Chen

Optimized polarization in DUV scatterometry with global sensitivity analysis for accurate CD metrology of sub-micron microstructure structures DUV散射测量术中优化偏振状态与全局敏感性分析，以实现亚微米微结构尺寸测量的高精度计量

Measurement Science and Technology

IF3.4

2026-01-09

OAAI

Fu-Sheng Yang; Yen-Hung Hung; Min-Ru Wu; Liang-Chia Chen

Artificial neural network-driven diffraction imaging for nanoscale optical critical dimension metrology in semiconductor microstructures

The International Journal of Advanced Manufacturing Technology

IF0

2026-01-08

PREAI

Fu-Sheng Yang; Liang-Chia Chen; Chao-Ching Ho

X-ray metrology for advanced semiconductor manufacturing of next-generation logic devices 先进半导体制造中下一代逻辑器件的X射线计量学

Journal of Micro-Nanopatterning Materials and Metrology-JM3

IF1.8

2026-01-01

PREAI

Pandey, Gaurav; Fu, Wei-En; Liu, Chun-Yu; Ho, Chao-Ching; Chen, Liang-Chia

Bright-field microscopic image resolution enhancement using a novel PSF calibration target and PSF-based Multi-channel Deconvolution U-Net for improving the optical diffraction limit 使用一种新型PSF校准目标和基于PSF的多通道去卷积U-Net对明场显微图像分辨率进行增强，以突破光学衍射极限。

Measurement

IF5.6

2025-12-11

PREAI

Yu-Ting Cheng; Ming-Jie Liu; Yu-Tang Huang; Liang-Chia Chen

Non-integral depth measurement of high-aspect-ratio multi-layer microstructures using numerical-aperture shaped beams

OPTICS AND LASERS IN ENGINEERING

IF3.7

2023-07-01

PREAI

Chein, Wei-Hsin; Yang, Fu-Sheng; Thakur, Komal; Wu, Guo-Wei; Chen, Liang-Chia

Full-field chromatic confocal microscopy for surface profilometry with sub-micrometer accuracy 用于亚微米级表面轮廓测量的全场彩色共焦显微镜

OPTICS AND LASERS IN ENGINEERING

IF3.7

2023-02-01

PREAI

Chen, Hong-Ruei; Chen, Liang-Chia

Precise 3-D microscopic profilometry using diffractive image microscopy and artificial neural network in single-exposure manner

OPTICS AND LASERS IN ENGINEERING

IF3.7

2021-12-01

PREAI

Wu, Guo-Wei; Chen, Liang-Chia

Full-field microsurface profilometry using image correlation without vertical scanning

OPTICS LETTERS

IF3.3

2019-07-11

PREAI

Wu, Guo-Wei; Duc Trung Nguyen; Chen, Liang-Chia

A Novel Surface Descriptor for Automated 3-D Object Recognition and Localization 一种用于自动三维物体识别和定位的新型表面描述符

SENSORS

IF3.5

2019-02-13

OAAI

Liang-Chia Chen; Thanh-Hung Nguyen

JOURNAL OF MOLECULAR AND CELLULAR CARDIOLOGY

IF4.7

2018-04-01

OAAI

Hung, Chung-Lieh; Lai, Yu-Jun; Chi, Po-Ching; Chen, Liang-Chia; Tseng, Ya-Ming; Kuo, Jen-Yuan; Lin, Cheng-I; Chen, Yao-Chang; Lin, Shing-Jong; Yeh, Hung-I

JOURNAL OF MOLECULAR AND CELLULAR CARDIOLOGY

IF4.7

2018-01-01

PREAI

Hung, Chung-Lieh; Lai, Yu-Jun; Chi, Po-Ching; Chen, Liang-Chia; Tseng, Ya-Ming; Kuo, Jen-Yuan; Lin, Cheng-I; Chen, Yao-Chang; Lin, Shing-Jong; Yeh, Hung-I

Reconstruction of accurate 3-D surfaces with sharp edges using digital structured light projection and multi-dimensional image fusion

OPTICS AND LASERS IN ENGINEERING

IF3.7

2017-09-01

PREAI

Le, Manh-Trung; Chen, Liang-Chia; Lin, Chih-Jer

Precise optical surface profilometry using innovative chromatic differential confocal microscopy

OPTICS LETTERS

IF3.3

2016-12-05

PREAI

Chen, Liang-Chia; Duc Trung Nguyen; Chang, Yi-Wei