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DC Voltage Reference Based on a Square-Wave-Actuated Microelectromechanical Sensor
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DOI：10.1109/TIM.2011.2144230.png)
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Long-term stability of a dc voltage standard based on a capacitive microelectromechanical system (MEMS) is investigated. Square-wave voltage actuation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle and the measurement results of the apparatus that implements the voltage standard are explained. Negligible voltage drift within the measurement scatter of +/- 2 parts per million during a 22-day measurement period was demonstrated.
Keyword:
Measurement standards
microelectromechanical devices
stability
voltage
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5.9
论文数:
2.0W
被引数:
5.8W
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