Junctionless multigate field-effect transistor

Chi‐Woo Lee

doi:10.1063/1.3079411

Junctionless multigate field-effect transistor

2009-02-06

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AI

Nima Dehdashti Akhavan

DOI：10.1063/1.3079411

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This paper describes a metal-oxide-semiconductor (MOS) transistor concept in which there are no junctions. The channel doping is equal in concentration and type to the source and drain extension doping. The proposed device is a thin and narrow multigate field-effect transistor, which can be fully depleted and turned off by the gate. Since this device has no junctions, it has simpler fabrication process, less variability, and better electrical properties than classical MOS devices with source and drain PN junctions.

Keyword:

field effect transistors

MOSFET

p-n junctions

semiconductor doping

Junctionless multigate field-effect transistor

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