Three-Dimensional Kelvin Probe Force Microscopy

Junyuan Geng

doi:10.1021/acsami.2c07645

2022-07-11

PRE

DOI：10.1021/acsami.2c07645

原文链接

原文求助

摘要

En 中文

Traditional Kelvin probe force microscopy (KPFM) is mainly limited to the characterization of two-dimensional (2D) surfaces, and in situ surface potential (SP) imaging along 3D device surfaces remains a challenge. This paper presents a multimode 3D-KPFM based on an orthogonal cantilever probe (OCP) that can achieve SP mapping of 3D micronano structures. It integrates three working modes: a bending mode for 2D horizontal surface imaging, a torsion mode for vertical sidewall imaging, and a vector tracking-based 3D scanning mode. The customized OCP has a nanoscale tip protruding from the side and underside of the cantilever, rather than the front, and the extended tip makes the proposed approach universally applicable for 3D detection from the nanometer to micrometer scale. The spatial resolution of the proposed method is analyzed by simulation, which shows it can reduce the cantilever homogenization effect. Linearity and energy resolution measurements show that the proposed method has comparable performance to traditional methods. A comparative experiment using a gold-silicon interface verifies the accuracy of the reported method in its bending and torsion modes. Further, the imaging ability of the 3D scanning mode is confirmed in the 3D characterization of a step grating. This technique is applied to the in situ characterization of a microforce sensor with microcomb structures. The experiment results show that this method can excellently achieve the 3D quantitative characterization of topography and SP, including critical dimensions and SP along a 3D device surface. This novel 3D-KPFM technique has many potential applications in the further exploration of 3D micronano devices.

Keyword:

multimode three-dimensional Kelvin probe force microscopy

orthogonal cantilever probe

three-dimensional devices

surface potential

critical dimensions

期刊

ACS Applied Materials and Interfaces

IF:

8.2

论文数:

6.1W

被引数:

38.7W

机构

harbin institute of technology

学者数:

8.0W

论文数: 6.6W

被引数: 66

引用论文

Sidewall Imaging of Microarray-Based Biosensor Using an Orthogonal Cantilever Probe

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT

IF5.9

2021-01-01

PREAI

Geng, Junyuan; Zhang, Hao; Meng, Xianghe; Rong, Weibin; Xie, Hui

Racial disparities in the prevalence of monoclonal gammopathies: a population-based study of 12 482 persons from the National Health and Nutritional Examination Survey 单克隆丙种球蛋白病患病率的种族差异: 来自国家健康和营养检查调查的12 482人的基于人群的研究

Leukemia

IF0

2014-01-20

OAAI

O Landgren; B I Graubard; J A Katzmann; R A Kyle; I Ahmadizadeh; R Clark; S K Kumar; A Dispenzieri; A J Greenberg; T M Therneau; L J Melton; N Caporaso; N Korde; M Roschewski; R Costello; G M McQuillan; S V Rajkumar

Direct Observation of Photoinduced Charge Separation at Transition-Metal Nitride-Semiconductor Interfaces

ACS APPLIED MATERIALS & INTERFACES

IF8.2

2020-12-01

PREAI

Yu, Min-Wen; Ishii, Satoshi; Shinde, Satish Laxman; Tanjaya, Nicholaus Kevin; Chen, Kuo-Ping; Nagao, Tadaaki

Ion doping of graphene for high-efficiency heterojunction solar cells 用于高效异质结太阳能电池的石墨烯离子掺杂

NANOSCALE

IF5.1

2013-01-01

141

PREAI