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A flexure-based electromagnetic nanopositioning actuator with predictable and re-configurable open-loop positioning resolution
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DOI：10.1016/j.precisioneng.2014.12.006.png)
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Abstract
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This paper presents a novel cylindrical-shaped Flexure-based Electromagnetic Linear Actuator (FELA) that exhibits predictable and re-configurable open-loop positioning resolution. By combining contactless Lorentz-force actuation and frictionless flexure-based supporting bearings, it produces high repeatable motion and sub-micron positioning resolution. In this paper, the design concept of this cylindrical-shaped FELA will be introduced. It focuses on the modeling of the flexure-based supporting bearings, the thermal modeling of the electromagnetic module, and the unique characteristics of FELA, i.e., predictable and reconfigurable open-loop positioning resolution. A prototype was developed to evaluate the performance and demonstrate these unique characteristics of this new class of nanopositioning actuator. (C) 2015 Elsevier Inc. All rights reserved.
Keywords:
Flexure joints
Semi-analytic model
Lorentz-force actuation
Nanopositioning actuator
Thermal modeling
Lumped capacitance model
Flexure modeling
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