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Applied Materials Inc

学者数241
论文数151
被引数0
关联论文 (150)
发表时间
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Atomic layer etching of sputter-deposited AlN thin films in radiofrequency Cl2–Ar plasmas射频Cl2–Ar等离子体中溅射沉积AlN薄膜的原子层刻蚀
errPlasma Sources Science and Technology
IF3.3
err2026-04-09
err0
errOAAI
errIurii Nesterenko; Joaquín Miranda-Mena; Benjamin Kalas; Dmytro Solonenko; Jon Farr; Steffen Harzenetter; Thang Duy Dao; Julian Schulze; Nikolai Andrianov
err分享
err收藏
N2 capacitively coupled plasma-moment analysis of particle-in-cell modeling resultsN2电容耦合等离子体的粒子-网格模型结果矩分析
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2026-04-01
err0
PREAI
errRauf, Shahid; Bera, Kallol; Nuwal, Nakul; Sahu, Rupali; Verma, Abhishek
err分享
err收藏
Materials Design Principles for Large Memory Windows: Coercive Voltage Engineering in Ferroelectric– Dielectric Heterostructures
errAdvanced Electronic Materials
IF5.3
err2026-02-04
err0
errOAAI
errPrasanna Venkatesan; Hari Jayasankar; Salma Soliman; Priyankka Ravikumar; Lance Fernandes; Chinsung Park; Amrit Garlapati; Chengyang Zhang; Sanghyun Kang; Shimeng Yu; Suman Datta; Asif Khan; Mengkun Tian; Zheng Wang; Kijoon Kim; Kwangyou Seo; Kwangsoo Kim; Wanki Kim; Daewon Ha; Luca Larcher; Gaurav Thareja; Andrea Padovani
err分享
err收藏
Ion-ion oscillation and periodic emission pattern in electronegative capacitively coupled radio frequency plasmas离子振荡和周期性发射模式在电负性电容耦合射频等离子体中
errPhysics of Plasmas
IF2.2
err2026-02-01
err0
PREAI
errWang, Tianhong; Rauf, Shahid; Friedrichs, Niklas; Korolov, Ihor; Kenney, Jason; Schulze, Julian
err分享
err收藏
Detection of atomic oxygen and its electronic coherence decays using time-resolved ultrafast coherent Raman scattering
errJOURNAL OF CHEMICAL PHYSICS
IF3.1
err2025-02-27
err0
PREAI
errChen, Timothy Y.; Kliewer, Christopher J.
err分享
err收藏
A Holistic Indirect Contact Identification Method for Soft Robot Proprioception
errSOFT ROBOTICS
IF6.1
err2025-02-24
err0
PREAI
errWang, Shuoqi; Lin, Keng-yu; Xu, Xiangru; Wehner, Michael
err分享
err收藏
Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range
errMICROMACHINES
IF3
err2025-01-08
err0
errOAAI
errRufer, Libor; Shubham, Shubham; Wang, Haoran; Miller, Tom; Honzik, Petr; Ferrari, Vittorio
err分享
err收藏
Bioavailability improvement by atomic layer coating: Fenofibrate a case study
errJOURNAL OF PHARMACEUTICAL SCIENCES
IF3.8
err2025-01-01
err0
PREAI
errGanapathy, Balaji; Redasani, Vijayendra; Debnath, Sujit; Gupta, Neha; Kadam, Ankur; Wang, Fei; Narwankar, Pravin
err分享
err收藏
Plasma sources for advanced semiconductor applications用于先进半导体应用的等离子体源
errAPPLIED PHYSICS LETTERS
IF3.6
err2024-12-05
err2
errOAAI
errVersolato, Oscar; Kaganovich, Igor; Bera, Kallol; Lill, Thorsten; Lee, Hyo-Chang; Hoekstra, Ronnie; Sheil, John; Nam, Sang Ki
err分享
err收藏
Ar/CF4 capacitively coupled plasma generated using 40 MHz sinusoidal and 800 kHz rectangular waveform voltages使用40 MHz正弦和800 kHz矩形波形电压产生的Ar/CF4电容耦合等离子体
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2024-12-03
err0
PREAI
errRauf, Shahid; Ganta, Sathya; Shi, Xingyi; Bera, Kallol; Kenney, Jason
err分享
err收藏
Identification of linear flat outputs using neural networks-Examples of two-degree-of-freedom underactuated mechanical systems
errMECHANICAL SYSTEMS AND SIGNAL PROCESSING
IF8.9
err2024-07-01
err0
PREAI
errMa, Shangjie Frank; Zhao, Anni; Sun, Jian-Qiao
err分享
err收藏
Obituary- Dr. Fuccio Cristiano
errMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
IF4.6
err2024-06-01
err0
PREAI
errAlberti, Alessandra; Colombeau, Benjamin; La Magna, Antonino; Hemeryck, Anne; Pelaz, Lourdes; Pichler, Peter
err分享
err收藏
Highly Reliable Magnetic Memory-Based Physical Unclonable Functions
errACS NANO
IF16
err2024-05-08
err2
errOAAI
errKang, Jaimin; Han, Donghyeon; Lee, Kyungchul; Ko, San; Koh, Daekyu; Park, Chando; Ahn, Jaesoo; Yu, Minrui; Pakala, Mahendra; Noh, Sujung; Lee, Hansaem; Kwon, Joonhyun; Kim, Kab-Jin; Park, Jongsun; Lee, Soogil; Lee, Jisung; Park, Byong-Guk
err分享
err收藏
Study of synchronous RF pulsing in dual frequency capacitively coupled plasma双频电容耦合等离子体中同步射频脉冲的研究
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2024-03-11
err1
errOAAI
errVerma, Abhishek; Rauf, Shahid; Bera, Kallol; Sydorenko, D.; Khrabrov, A.; Kaganovich, Igor
err分享
err收藏
Inverse parameter estimation using compressed sensing and POD-RBF reduced order models
errCOMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING
IF7.3
err2024-03-01
err3
PREAI
errRao, Preetham P.
err分享
err收藏
A neural-network-based model of radio-frequency hollow cathode discharge characterized using particle-in-cell/Monte Carlo collision simulation基于神经网络的射频空心阴极放电模型，使用单元内粒子/蒙特卡洛碰撞模拟来表征
errJOURNAL OF PHYSICS D-APPLIED PHYSICS
IF3.2
err2024-02-29
err2
PREAI
errBera, Kallol; Verma, Abhishek; Ganta, Sathya; Rauf, Shahid
err分享
err收藏
CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer通过反应离子溅射在300毫米Si晶片上沉积CMOS兼容的超薄超导NbN薄膜
errMATERIALS
IF3.2
err2023-11-30
err0
errOAAI
errYang, Zihao; Wei, Xiucheng; Roy, Pinku; Zhang, Di; Lu, Ping; Dhole, Samyak; Wang, Haiyan; Cucciniello, Nicholas; Patibandla, Nag; Chen, Zhebo; Zeng, Hao; Jia, Quanxi; Zhu, Mingwei
err分享
err收藏
Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge双频电容耦合氧放电中离子能量分布函数的数值和实验研究
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2023-11-28
err3
PREAI
errLuo, Han; Kenney, Jason; Rauf, Shahid; Korolov, Ihor; Schulze, Julian
err分享
err收藏
Rotating spokes, potential hump and modulated ionization in radio frequency magnetron discharges
errPLASMA SOURCES SCIENCE & TECHNOLOGY
IF3.3
err2023-10-20
err5
errOAAI
errXu, Liang; Sun, Haomin; Eremin, Denis; Ganta, Sathya; Kaganovich, Igor; Bera, Kallol; Rauf, Shahid; Wu, Xuemei
err分享
err收藏
Ge0.92Sn0.08/Ge multi-quantum-well LEDs operated at 2-μm-wavelength on a 12-inch Si substrate
errPHOTONICS RESEARCH
IF7.2
err2023-09-12
err10
errOAAI
errWu, Shaoteng; Zhang, Lin; Wan, Rongqiao; Zhou, Hao; Lee, Kwang Hong; Chen, Qimiao; Huang, Yi-Chiau; Gong, Xiao; Tan, Chuan Seng
err分享
err收藏