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CEA

19H指数
211论文数
1.3K被引数
收录论文 5
发表时间
Area selective deposition using alternate deposition and etch super-cycle strategies
err2022-01-01
err12
PREAI
errBonvalot, Marceline; Vallee, Christophe; Mannequin, Cedric; Jaffal, Moustapha; Gassilloud, Remy; Posseme, Nicolas; Chevolleau, Thierry
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Topographically selective deposition
err2019-01-28
err14
PREAI
errChaker, A.; Vallee, C.; Pesce, V.; Belahcen, S.; Vallat, R.; Gassilloud, R.; Posseme, N.; Bonvalot, M.; Bsiesy, A.
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An embedded neutral layer for advanced surface affinity control in grapho-epitaxy directed self-assembly
err2018-01-01
err1
PREAI
errDelachat, Florian; Gharbi, Ahmed; Pimenta-Barros, Patricia; Fouquet, Antoine; Claveau, Guillaume; Posseme, Nicolas; Pain, Laurent; Nicolet, Celia; Navarro, Christophe; Cayrefourcq, Ian; Tiron, Raluca
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Prediction of porous dielectric line wiggling phenomenon with metallic hard mask: From simulation to experiment
err2014-06-09
err12
errOAAI
errDucote, J.; Posseme, N.; David, T.; Darnon, M.; Chevolleau, T.; Guillermet, M.
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